Miniature photoacoustic chemical sensor using microelectromechanical structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5416, Issue , 2004, Pages 42-53

  Pellegrino, Paul M ^a   Polcawich, Ronald G ^a   Firebaugh, Samara L ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNITED STATES NAVAL ACADEMY   (United States)

Author keywords

Chemical sensor; Microelectromechanical systems; Photoacoustics; Piezoelectrics

Indexed keywords

BIOLOGICAL SENSING; CHEMICAL SENSING; EUTECTIC BOND; MICROELECTROMECHANICAL SYSTEMS;

GAS DETECTORS; LIGHT ABSORPTION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROPHONES; NATURAL FREQUENCIES; PERTURBATION TECHNIQUES; PHOTOACOUSTIC SPECTROSCOPY; PIEZOELECTRICITY; SENSITIVITY ANALYSIS;

CHEMICAL SENSORS;

EID: 8844261961     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.543934     Document Type: Conference Paper

References (12)

1. M. Nägele, M.W. Sigrist, "Mobile laser spectrometer with novel resonant multipass photoacoustic cell for tracegas sensing," Appl. Phys. B 70, pp. 895-901 (2001).
2. F.G.C. Bijnen, J. Reuss, and F.J.M. Harren, "Geometrical optimization of a longitudinal photoacoustic cell for a sensitive and fast trace gas detection, " Rev. Sci. Instrum. 67, pp. 2914-2933 (1996).
3. S.L. Firebaugh, K.F. Jensen, and M.A. Schmidt, "Miniaturization and Integration of Photoacoustic Detection with a Microfabricated Chemical Reactor System," JMEMS, 10, pp 232-237, (2001).
4. S.L. Firebaugh, K.F. Jensen, and M.A. Schmidt, "Miniaturization and integration of photoacoustic detection," J. Appl. Phys. 92, pp. 1555-1563 (2002).
5. P. Pellegrino and R. Polcawich, "Evaluation of a MEMS Photoacoustic Sensor," Proceedings of 2002 Joint Service Scientific Conference Chemical Biological Defense Research, Hunt Valley, MD (point detection).
6. P. Pellegrino and R. Polcawich, "Advancement of a MEMS Photoacoustic Chemical Sensor," SPIE Chemical and Biological Sensing IV, Vol. 5085, 52-63 (2003)
7. U. Bonne, B.E. Cole, and R.E. Higashi, US Patent No. 5,886,249.
8. F. Laermer and A. Schilp, "Method of Anisotropically Etching Silicon", US-Patent No. 55018893.
9. W.H. Ko, J. T. Suminto, and G. J. Yeh, Bonding techniques for Microsensors, " Micromaching and Micropackaging for Transducers, Amsterdam, The Netherlands: Elsevier, 1985.
10. Y. T. Cheng, L. Lin, K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging, " JMEMS, 9, pp 3-8, (2000).
11. S. Bernegger and M.W. Sigrist, "CO-laser photoacoustic spectroscopy of gases and vapours for trace gas analysis," Infr. Phys., vol. 30, pp. 375-429, 1990.
12. P.M. Morse and K. U. Ingard, Theoretical Acoustics, Princeton University Press, Princeton, NJ, 1968.