Advancement of a MEMS Photoacoustic Chemical Sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5085, Issue , 2003, Pages 52-63

  Pellegrino, Paul M ^a   Polcawich, Ronald G ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Chemical sensor; Microelectromechanical systems; Photoacoustics; Piezoelectrics

Indexed keywords

CAVITY RESONATORS; INTERFACES (MATERIALS); INTERFEROMETRY; LEAD COMPOUNDS; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MICROPHONES; PHOTOACOUSTIC EFFECT; RESONANCE; SPECTROSCOPIC ANALYSIS;

TRACE GAS DETECTION;

CHEMICAL SENSORS;

EID: 0242719945     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.487134     Document Type: Conference Paper

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