Examination of quantum cascade laser source for a MEMS-scale photoacoustic chemical sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6218, Issue , 2006, Pages

  Heaps, David A ^a   Pellegrino, Paul M ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Chemical sensor; Microelectromechanical systems; Photoacoustics; Piezoelectrics

Indexed keywords

ARMY RESEARCH LABORATORY (ARL); PHOTOACOUSTIC RESONATORS; QUANTUM CASCADE LASER (QCL);

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; MICROELECTROMECHANICAL DEVICES; PHOTOACOUSTIC SPECTROSCOPY; PIEZOELECTRIC DEVICES; QUANTUM THEORY;

LASER BEAM EFFECTS;

EID: 33747463535     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.670040     Document Type: Conference Paper

References (8)

1. M. Nägele, M.W. Sigrist, "Mobile laser spectrometer with novel resonant multipass photoacoustic cell for trace-gas sensing," Appl. Phys. B 70, pp. 895-901 (2001).
2. F.G.C. Bijnen, J. Reuss, and F.J.M. Harren, "Geometrical optimization of a longitudinal photoacoustic cell for a sensitive and fast trace gas detection, "Rev. Sci. Instrum. 67, pp. 2914-2933 (1996).
3. M.W. Sigrist, "Trace gas monitoring by laser-photoacoustic spectroscopy," Infrared Phys. Technol. 36, Vol. 1, pp. 415-425 (1995)
4. S.L. Firebaugh, K.F. Jensen, and M.A. Schmidt, "Miniaturization and Integration of Photoacoustic Detection with a Microfabricated Chemical Reactor System," JMEMS, 10, pp 232-237, (2001).
5. S.L. Firebaugh, K.F. Jensen, and M.A. Schmidt, "Miniaturization and integration of photoacoustic detection," J. Appl. Phys. 92, pp.1555-1563 (2002).
6. P. Pellegrino and R. Polcawich, "Evaluation of a MEMS Photoacoustic Sensor," Proceedings of 2002 Joint Service Scientific Conference Chemical Biological Defense Research, Hunt Valley, MD (point detection).
7. P. Pellegrino and R. Polcawich, "Advancement of a MEMS Photoacoustic Chemical Sensor," SPIE Chemical and Biological Sensing IV, Vol. 5085, 52-63 (2003)
8. U. Bonne, B.E. Cole, and R.E. Higashi, US Patent No. 5,886,249.