Stress modification in gold metal thin films during thermal annealing

Optica Applicata

Volumn 39, Issue 4, 2009, Pages 705-710

  Prószyński, Adam ^a   Chocyk, Dariusz ^a   Gładyszewski, Grzegorz ^a  

^a LUBLIN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Annealing; Strain; Stress; Thin films

Indexed keywords

AU THIN FILMS; FIRST CYCLE; METAL FILM; METAL THIN FILM; STRESS EVOLUTION; STRUCTURAL CHANGE; STRUCTURAL MODIFICATIONS; SUBSTRATE CURVATURE; THERMAL VACUUM; THERMAL-ANNEALING; X-RAY DIFFRACTION MEASUREMENTS;

ANNEALING; DEPOSITION; GOLD COATINGS; GOLD DEPOSITS; METAL ANALYSIS; STRESS MEASUREMENT; THERMAL EVAPORATION; THIN FILMS; VACUUM EVAPORATION;

GOLD;

EID: 77449115776     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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