Chemical vapor deposition of GaN from gallium and ammonium chloride

Inorganic Materials

Volumn 40, Issue 10, 2004, Pages 1049-1053

  Red'kin, A N ^a   Tatsii, V I ^a   Makovei, Z I ^a   Gruzintsev, A N ^a   Yakimov, E E ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM CHLORIDE; GALLIUM CHLORIDE;

ARTICLE; CHEMICAL REACTION; CRYSTAL STRUCTURE; PHOTOLUMINESCENCE; ROOM TEMPERATURE; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; STOICHIOMETRY; VAPOR;

EID: 7744228409     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:INMA.0000046466.62619.e9     Document Type: Article

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