Three-dimensional metal nanoimprint technique for electrode and electric probe

Journal of Physics: Conference Series

Volumn 191, Issue , 2009, Pages

  Unno, N ^a,b   Taniguchi, J ^a   Ide, S ^a   Ishikawa, S ^a   Ootsuka, Y ^c   Yamabe, K ^c   Kanbara, T ^c  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b University of Tsukuba ^*

^c UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 73849086644     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/191/1/012014     Document Type: Conference Paper

References (4)

1. Yan H, Chen Z, Zheng Y, Newman C, Quinn J R, Dötz F, Kastler M and Facchetti A 2009 Nature 457 679
2. Kumar A and Whitesides G M 1993 Appl.Phys.Lett. 63 2002
3. Loo Y L, Willett R L, Baldwin K W and Rogers J A 2002 Appl. Phys. Lett. 81 562
4. Unno N, Taniguchi J and Ishii Y 2007 J. Vac. Sci. Technol. B 25 2361