메뉴 건너뛰기




Volumn 24, Issue 5, 2006, Pages 2207-2218

Fabrication of add-drop filters based on frequency-matched microring resonators

Author keywords

Add drop filters; Coupling induced frequency shifts (CIFS); Electron beam (e beam) proximity effects; Fabrication; Microring resonators

Indexed keywords

CAVITY RESONATORS; ELECTRON BEAM LITHOGRAPHY; FABRICATION; MICROOPTICS; OPTICAL FREQUENCY CONVERSION; OPTICAL WAVEGUIDES;

EID: 33646920321     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.872298     Document Type: Article
Times cited : (148)

References (25)
  • 1
    • 8744252573 scopus 로고    scopus 로고
    • "Spectral anomalies due to coupling-induced frequency shifts in dielectric coupled resonator filters"
    • Washington, DC
    • C. Manolatou, M. A. Popovic, P. T. Rakich, T. Barwicz, H. A. Haus, and E. P. Ippen, "Spectral anomalies due to coupling-induced frequency shifts in dielectric coupled resonator filters," in Proc. Opt. Fiber Commun. Conf., Washington, DC, 2004, pp. 379-381.
    • (2004) Proc. Opt. Fiber Commun. Conf. , pp. 379-381
    • Manolatou, C.1    Popovic, M.A.2    Rakich, P.T.3    Barwicz, T.4    Haus, H.A.5    Ippen, E.P.6
  • 2
    • 32644440374 scopus 로고    scopus 로고
    • "Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters"
    • Feb
    • M. A. Popovic, C. Manolatou, and H. A. Haus, "Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters," Opt. Express, vol. 14, no. 3, pp. 1208-1222, Feb. 2006.
    • (2006) Opt. Express , vol.14 , Issue.3 , pp. 1208-1222
    • Popovic, M.A.1    Manolatou, C.2    Haus, H.A.3
  • 3
    • 2942708070 scopus 로고    scopus 로고
    • "Microring-resonator-based add-drop filters in SiN: Fabrication and analysis"
    • Apr
    • T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: Fabrication and analysis," Opt. Express, vol. 12, no. 7, pp. 1437-1442, Apr. 2004.
    • (2004) Opt. Express , vol.12 , Issue.7 , pp. 1437-1442
    • Barwicz, T.1    Popovic, M.A.2    Rakich, P.T.3    Watts, M.R.4    Haus, H.A.5    Ippen, E.P.6    Smith, H.I.7
  • 4
    • 1642506265 scopus 로고    scopus 로고
    • "A VLSI photonic platform"
    • Washington, DC
    • B. E. Little, "A VLSI photonic platform," in Proc. Opt. Fiber Commun. Conf., Washington, DC, 2003, vol. 2, pp. 444-445.
    • (2003) Proc. Opt. Fiber Commun. Conf. , vol.2 , pp. 444-445
    • Little, B.E.1
  • 6
    • 0036705335 scopus 로고    scopus 로고
    • "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter"
    • Aug
    • Y. Yanagase, S. Suzuki, Y. Kokubun, and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," J. Lightw. Technol., vol. 20, no. 8, pp. 1525-1529, Aug. 2002.
    • (2002) J. Lightw. Technol. , vol.20 , Issue.8 , pp. 1525-1529
    • Yanagase, Y.1    Suzuki, S.2    Kokubun, Y.3    Chu, S.T.4
  • 7
    • 30844450348 scopus 로고    scopus 로고
    • "Multistage high-order microring-resonator filters with relaxed tolerances for high through-port extinction"
    • presented at the Conf. Lasers and Electro-Optics, Baltimore, MD Paper CMP2
    • M. A. Popovic, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Multistage high-order microring-resonator filters with relaxed tolerances for high through-port extinction," presented at the Conf. Lasers and Electro-Optics, Baltimore, MD, 2005, Paper CMP2.
    • (2005)
    • Popovic, M.A.1    Barwicz, T.2    Watts, M.R.3    Rakich, P.T.4    Socci, L.5    Ippen, E.P.6    Kärtner, F.X.7    Smith, H.I.8
  • 8
    • 0036474299 scopus 로고    scopus 로고
    • "Synthesis of direct-coupled-resonators bandpass filters for WDM systems"
    • Feb
    • A. Melloni and M. Martinelli, "Synthesis of direct-coupled-resonators bandpass filters for WDM systems," J. Lightw. Technol., vol. 20, no. 2, pp. 296-303, Feb. 2002.
    • (2002) J. Lightw. Technol. , vol.20 , Issue.2 , pp. 296-303
    • Melloni, A.1    Martinelli, M.2
  • 9
    • 84899143908 scopus 로고    scopus 로고
    • "High-index-contrast, wide-FSR microring-resonator filter design and realization with frequency-shift compensation"
    • presented at the Optical Fiber Communication Conf., Anaheim, CA Paper OFK1
    • M. A. Popovic, M. R. Watts, T. Barwicz, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "High-index-contrast, wide-FSR microring-resonator filter design and realization with frequency-shift compensation," presented at the Optical Fiber Communication Conf., Anaheim, CA, 2005, Paper OFK1.
    • (2005)
    • Popovic, M.A.1    Watts, M.R.2    Barwicz, T.3    Rakich, P.T.4    Socci, L.5    Ippen, E.P.6    Kärtner, F.X.7    Smith, H.I.8
  • 10
    • 33646912275 scopus 로고    scopus 로고
    • Mitsubishi Rayon America Inc. aquaSAVE Datasheet. [Online]. Available
    • Mitsubishi Rayon America Inc. (2004). aquaSAVE Datasheet. [Online]. Available: http://www.mrany.com
    • (2004)
  • 11
    • 0942267528 scopus 로고    scopus 로고
    • "Evolution of line-edge-roughness during fabrication of high index-contrast microphotonic devices"
    • Nov./Dec
    • T. Barwicz and H. I. Smith, "Evolution of line-edge-roughness during fabrication of high index-contrast microphotonic devices," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 21, no. 6, pp. 2892-2896, Nov./Dec. 2003.
    • (2003) J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. , vol.21 , Issue.6 , pp. 2892-2896
    • Barwicz, T.1    Smith, H.I.2
  • 13
    • 0028482287 scopus 로고
    • "Effect of side wall roughness in buried channel waveguides"
    • Aug
    • F. Ladouceur, J. D. Love, and T. J. Senden, "Effect of side wall roughness in buried channel waveguides," Proc. Inst. Elect. Eng.-Optoelectron., vol. 141, no. 4, pp. 242-248, Aug. 1994.
    • (1994) Proc. Inst. Elect. Eng.-Optoelectron. , vol.141 , Issue.4 , pp. 242-248
    • Ladouceur, F.1    Love, J.D.2    Senden, T.J.3
  • 14
    • 0014642825 scopus 로고
    • "Radiation losses of dielectric waveguides in terms of the power spectrum of the wall distortion function"
    • Dec
    • D. Marcuse, "Radiation losses of dielectric waveguides in terms of the power spectrum of the wall distortion function," Bell Syst. Tech. J., vol. 48, no. 10, pp. 3233-3244, Dec. 1969.
    • (1969) Bell Syst. Tech. J. , vol.48 , Issue.10 , pp. 3233-3244
    • Marcuse, D.1
  • 15
    • 26844477560 scopus 로고    scopus 로고
    • "Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides"
    • Sep
    • T. Barwicz and H. A. Haus, "Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides," J. Lightw. Technol., vol. 23, no. 9, pp. 2719-2732, Sep. 2005.
    • (2005) J. Lightw. Technol. , vol.23 , Issue.9 , pp. 2719-2732
    • Barwicz, T.1    Haus, H.A.2
  • 17
    • 2942708124 scopus 로고    scopus 로고
    • "Losses in single-mode silicon-oninsulator strip waveguides and bends"
    • Apr
    • Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-oninsulator strip waveguides and bends," Opt. Express, vol. 12, no. 8, pp. 1622-1631, Apr. 2004.
    • (2004) Opt. Express , vol.12 , Issue.8 , pp. 1622-1631
    • Vlasov, Y.A.1    McNab, S.J.2
  • 18
    • 0033269521 scopus 로고    scopus 로고
    • "Fundamental performance of state-of-the-art proximity effect correction methods"
    • Nov./Dec
    • U. Hofmann, R. Crandall, and L. Johnson, "Fundamental performance of state-of-the-art proximity effect correction methods," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 17, no. 6, pp. 2940-2944, Nov./Dec. 1999.
    • (1999) J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. , vol.17 , Issue.6 , pp. 2940-2944
    • Hofmann, U.1    Crandall, R.2    Johnson, L.3
  • 19
    • 0022992256 scopus 로고
    • "Determination of the proximity parameters in electron beam lithography using doughnut-structures"
    • Dec
    • L. Stevens, R. Jonckheere, E. Froyen, S. Decoutere, and D. Lanneer, "Determination of the proximity parameters in electron beam lithography using doughnut-structures," Microelectron. Eng., vol. 5, no. 1-4, pp. 141-150, Dec. 1986.
    • (1986) Microelectron. Eng. , vol.5 , Issue.1-4 , pp. 141-150
    • Stevens, L.1    Jonckheere, R.2    Froyen, E.3    Decoutere, S.4    Lanneer, D.5
  • 20
    • 0000969849 scopus 로고
    • "Point exposure distribution measurements for proximity correction in electron-beam lithography on a sub-100 nm scale"
    • Jan./Feb
    • S. A. Rishton and D. P. Kern, "Point exposure distribution measurements for proximity correction in electron-beam lithography on a sub-100 nm scale," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 5, no. 1, pp. 135-141, Jan./Feb. 1987.
    • (1987) J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. , vol.5 , Issue.1 , pp. 135-141
    • Rishton, S.A.1    Kern, D.P.2
  • 21
    • 0016572881 scopus 로고
    • "Proximity effect in electron-beam lithography"
    • Nov./Dec
    • T. H. P. Chang, "Proximity effect in electron-beam lithography," J. Vac. Sci. Technol., vol. 12, no. 6, pp. 1271-1275, Nov./Dec. 1975.
    • (1975) J. Vac. Sci. Technol. , vol.12 , Issue.6 , pp. 1271-1275
    • Chang, T.H.P.1
  • 22
    • 33646906655 scopus 로고    scopus 로고
    • "Theoretical and experimental study of electron beam exposure for microphotonic devices"
    • presented at the Electron, Ion Photon Beam Technology Nanofabrication Conf., Orlando, FL, May 31-Jun. 3
    • Y. Ma, F. Cerrina, T. Barwicz, and H. I. Smith, "Theoretical and experimental study of electron beam exposure for microphotonic devices," presented at the Electron, Ion Photon Beam Technology Nanofabrication Conf., Orlando, FL, May 31-Jun. 3, 2005.
    • (2005)
    • Ma, Y.1    Cerrina, F.2    Barwicz, T.3    Smith, H.I.4
  • 23
    • 0004294751 scopus 로고
    • "Light transport in tissue"
    • Ph.D. dissertation, Biomed. Eng., Univ. Texas, Austin. Online. Available
    • S. A. Prahl. (1988). "Light transport in tissue," Ph.D. dissertation, Biomed. Eng., Univ. Texas, Austin. Online. Available: http://omlc.ogi.edu/pubs/pdf/prahl88.pdf
    • (1988)
    • Prahl, S.A.1
  • 24
    • 33646918134 scopus 로고    scopus 로고
    • private communication, Apr. MIT: Cambridge, MA
    • C. W. Holzwarth, private communication, Apr. 2005, MIT: Cambridge, MA.
    • (2005)
    • Holzwarth, C.W.1
  • 25
    • 33646915024 scopus 로고    scopus 로고
    • "Accurate nanofabrication techniques for high-index-contrast microphotonic devices"
    • Ph.D. dissertation, Dept. Mater. Sci. Eng., Mass. Inst. Technol., Cambridge, MA
    • T. Barwicz, "Accurate nanofabrication techniques for high-index-contrast microphotonic devices," Ph.D. dissertation, Dept. Mater. Sci. Eng., Mass. Inst. Technol., Cambridge, MA, 2005.
    • (2005)
    • Barwicz, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.