State-of-the-art in defect control of bulk SiC

1998 High-Temperature Electronic Materials, Devices and Sensors Conference

Volumn 1998-February, Issue , 1998, Pages 2-13

  Bakin, A S ^a   Dorozhkin, S I ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; SILICON CARBIDE; SUBLIMATION;

DEFECT CONTROL; DEFECT FORMATION; POLYTYPE CONTROL; STATE OF THE ART; SUBLIMATION GROWTH;

SILICON COMPOUNDS;

EID: 76649140726     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HTEMDS.1998.730635     Document Type: Conference Paper

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