A perforated plate stacked Si/glass heat exchanger with in-situ temperature sensing for Joule-Thomson coolers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 844-847

  Zhu, Weibin ^a,c   White, Michael J ^b   Nellis, Gregory F ^b   Klein, Sanford A ^b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Wisconsin Madison   (United States)

^c NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COOLING SYSTEMS; HEAT EXCHANGERS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; PLATINUM; REACTIVE ION ETCHING; SILICON; SILICON DETECTORS; SOLAR WATER HEATERS; TEMPERATURE MEASURING INSTRUMENTS; TEMPERATURE SENSORS;

IN-SITU TEMPERATURES; INTERNATIONAL CONFERENCES; JOULE-THOMSON; JOULE-THOMSON COOLERS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; PERFORATED PLATES; RESISTANCE-TEMPERATURE DETECTORS; SILICON PLATES;

OPTICAL DESIGN;

EID: 50149102192     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443788     Document Type: Conference Paper

References (7)

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