Two approaches to micromachining si heat exchanger for Joule-Thomson cryosurgical probes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 317-320

  Zhu, Weibin ^a,d   White, Michael J ^b   Hoch, Daniel W ^c   Nellis, Gregory F ^b   Klein, Sanford A ^b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Wisconsin Madison   (United States)

^c University of North Carolina at Charlotte   (United States)

^d NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; HEAT EXCHANGERS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; REACTIVE ION ETCHING; SILICON; SOLAR WATER HEATERS;

BASE PLATES; CRYOSURGICAL PROBES; HIGH CONDUCTIVITY; INTERNATIONAL CONFERENCES; JOULE-THOMSON; LOW CONDUCTIVITY; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; PLANAR DEVICES; PYREX GLASS; RECUPERATIVE HEAT EXCHANGERS; TWO TYPES;

RIVERS;

EID: 50149101745     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

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