Influence of O contamination and Au cluster properties on the structural features of Si nanowires

Thin Solid Films

Volumn 518, Issue 9, 2010, Pages 2562-2564

  Pecora, Emanuele F ^a,b   Irrera, Alessia ^a   Priolo, Francesco ^a,b  

^a INFM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Nanowire; Scanning electron microscopy; Silicon; Vapour liquid solid

Indexed keywords

ATOM ARRANGEMENT; ATOM DIFFUSION; AU CLUSTERS; ELECTRON BEAM EVAPORATION; EXPERIMENTAL CONDITIONS; GROWTH PROCESS; HEATED SUBSTRATES; NANO-DEVICES; PRECISE CONTROL; ROOM TEMPERATURE; SI NANOWIRE; SILICON NANOWIRES; STRUCTURAL FEATURE; SURFACE CONTAMINATIONS; THERMAL-ANNEALING; VAPOR-LIQUID-SOLID MECHANISM; VAPOUR-LIQUID-SOLID;

ELECTRON BEAMS; LIQUIDS; NANOWIRES; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; VAPORS;

SILICON OXIDES;

EID: 76049098550     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.08.019     Document Type: Article

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