Impact of carbon on the diffusion of donor atoms in germanium

Defect and Diffusion Forum

Volumn 289-292, Issue , 2009, Pages 689-696

  Bracht, H ^a   Brotzmann, S ^a   Chroneos, A ^b  

^a UNIVERSITY OF MÜNSTER   (Germany)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Antimony; Arsenic; Atomistic calculations; Carbon; Defect reactions; Dopant vacancy complexes; Germanium; Phosphorus; Vacancy mechanism

Indexed keywords

ANTIMONY; ARSENIC; CARBON; DENSITY FUNCTIONAL THEORY; DIFFUSION; DOPING (ADDITIVES); GERMANIUM; METALS; MOS DEVICES; MOSFET DEVICES; OXIDE SEMICONDUCTORS; PHOSPHORUS;

ADDITIONAL REACTIONS; ATOMISTIC CALCULATIONS; DEFECT REACTIONS; DOPANT CONCENTRATIONS; DOPANT DEACTIVATION; MULTILAYER STRUCTURES; VACANCY COMPLEXES; VACANCY MECHANISMS;

AGGLOMERATION;

EID: 75949099310     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/DDF.289-292.689     Document Type: Conference Paper

References (22)

1. Germanium-Based Technologies - From Materials to Devices, edited by C. Claeys and E. Simoen (Elsevier, Amsterdam, 2007).
2. D.P. Brunco, B. De Jaeger, G. Eneman, J. Mitard, G. Hellings, A. Satta, V. Terzieva, L. Souriau, F.E. Leys, G. Pourtois, M. Houssa, G. Winderickx, E. Vrancken, S. Sioncke, K. Opsomer, G. Nicholas, M. Caymax, A. Stesmans, J. Van Steenbergen, P.W. Mertens, M. Meuris, and M.M. Heyns: J. Electrochem. Soc. Vol. 155 (2008), p. H552
3. Chi On Chui, K. Gopalakrishnan, P.B. Griffin, J.D. Plummer, and K.C. Saraswat: Appl. Phys. Lett. Vol. 83 (2003), p. 3275.
4. M.S. Carroll and R. Koudelka: Semicond. Sci. Technol. Vol. 22 (2007), p. S164.
5. H. Bracht and S. Brotzmann: Mat. Sci. Semicond. Process. Vol. 9 (2006), p. 471.
6. S. Brotzmann and H. Bracht: J. Appl. Phys. Vol. 103 (2008), 033508.
7. H. Bracht: Phys. Rev. B. Vol. 75 (2007) 035210.
8. C. Janke, R. Jones, S. Öberg, and P.R. Briddon: Phys. Rev. B Vol. 77 (2008), 195210.
9. S. Brotzmann, H. Bracht, J. Lundsgaard Hansen, A. Nylandsted Larsen, E. Simoen, E. E. Haller, J. S. Christensen, and P. Werner: Phys. Rev. B Vol. 77 (2008), 235207.
10. M. Werner, H. Mehrer, and H. D. Hochheimer: Phys. Rev. B Vol. 32 (1985), p. 3930.
11. E.E. Haller, W.L. Hansen, P. Luke, R. McMurray, and B. Jarrett: IEEE Trans. Nucl. Sci. Vol. 29 (1982), p. 745.
12. J. D'Arcy-Gall, D. Gall, I. Petrov, P. Desjardins, and J. E. Greene: J. Appl. Phys. Vol. 90 (2001), p. 3910.
13. A. Chroneos: Phys. Stat. Sol. B Vol. 244 (2007), p. 3206.
14. A. Chroneos, R. W. Grimes B. P. Uberuaga, S. Brotzmann and H. Bracht: Appl. Phys. Lett. Vol. 91 (2007), p. 192106.
15. H. Bracht and A. Chroneos: J. Appl. Phys. Vol. 104 (2008), 076108.
16. M.D. Segall, P.J.D. Lindan, M.J. Probert, C.J. Pickard, P.J. Hasnip, S.J. Clark, and M.C. Payne: J. Phys.: Condens. Matter Vol. 14 (2002), p. 2717.
17. N. Gorind, M. Petersen, G. Fitzgerald, D. King-Smith, and J. Andzelm: Comput. Mater. Sci. Vol. 28 (2003), p. 250.
18. A. Chroneos, R.W. Grimes, B.P. Uberuaga, and H. Bracht, Phys. Rev. B Vol. 77 (2008), 235208.
19. A. Chroneos, B. P. Uberuaga, and R. W. Grimes: J. Appl. Phys. Vol. 102 (2007), 083707.
20. A. Chroneos, H. Bracht, R. W. Grimes, and B. P. Uberuaga, Appl. Phys. Lett. Vol. 92 (2008), 172103.
21. F. A. Kröger and V. J. Vink, in Solid State Physics, edited by F. Seitz and D. Turnbull (Academic, New York, 1956), Vol. 3, p. 307.
22. A. Chroneos, H. Bracht, R. W. Grimes, and B. P. Uberuaga, Mater. Sci. Eng. B Vol. 154-155 (2008), p.72.