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Volumn 156-158, Issue , 2009, Pages 547-554
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Silicon periodic structures and their liquid crystal composites
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Author keywords
Electrochemical etching of silicon; FTIR microspectroscopy; Liquid crystals; Photonic crystals; Wet anisotropic etching
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Indexed keywords
ANISOTROPIC ETCHING;
ANISOTROPY;
ASPECT RATIO;
CRYSTAL STRUCTURE;
DEFECTS;
ELECTROCHEMICAL ETCHING;
FABRICATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
LIGHT TRANSMISSION;
LIQUID CRYSTALS;
LIQUIDS;
MICROCOMPUTERS;
OPTICAL PROPERTIES;
PERIODIC STRUCTURES;
PHOTONIC BAND GAP;
PHOTONIC CRYSTALS;
PHOTONICS;
SEMICONDUCTOR DEVICE MANUFACTURE;
TUNING;
WET ETCHING;
CHROMIUM COMPOUNDS;
ENERGY GAP;
SILICON;
SILICON PHOTONICS;
CHARACTERISATION;
FTIR;
FTIR MICROSPECTROSCOPY;
HIGH ASPECT RATIO;
INFRA RED;
LIQUID-CRYSTAL COMPOSITES;
MICRO SPECTROSCOPY;
MICRO-PHOTONICS;
ONE-DIMENSIONAL (1D) PHOTONIC CRYSTALS;
OPTICAL REFLECTION;
PHOTO-ELECTROCHEMICAL ETCHING;
PHOTONIC STRUCTURE;
SIDE WALLS;
SILICON WALLS;
WET ANISOTROPIC ETCHING;
WET ETCHING TECHNIQUES;
WIDE SPECTRAL RANGE;
FOURIER TRANSFORM INFRA REDS;
PHOTONIC BAND GAP (PBG);
NEMATIC LIQUID CRYSTALS;
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EID: 75849148345
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/SSP.156-158.547 Document Type: Conference Paper |
Times cited : (7)
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References (29)
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