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Volumn 92, Issue 10, 2008, Pages

Angular spectrum tailoring in solid immersion microscopy for circuit analysis

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; LIGHT MODULATION; MICROSCOPIC EXAMINATION; PHOTOEXCITATION; SILICON; SPECTRUM ANALYSIS;

SOLID IMMERSION LENS; SOLID IMMERSION MICROSCOPY; SUPERCRITICAL LIGHT;

ELECTRIC NETWORK ANALYSIS;

EID: 40849098803 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2892656 Document Type: Article

Times cited : (21)

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