SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 81, Issue 1, 2010, Pages

Microdisplacement sensor using an optically trapped microprobe based on the interference scale

(4) Michihata, Masaki a Hayashi, Terutake a Nakai, Daisuke a Takaya, Yasuhiro a

a OSAKA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLACEMENT INFORMATION; DISPLACEMENT SENSOR; GLASS MICROSPHERES; HIGH RESOLUTION; LASER TRAPPING; LINEAR SCALE; MICRO-PROBES; MICRODISPLACEMENT SENSOR; NANO SCALE; OPTICAL AXIS; POSITIONING DEVICES; POSITIONING TECHNOLOGIES; SENSING PROBE; SHORTER WAVELENGTH; TARGET SURFACE; TRAPPING LASER;

GLASS LASERS; MICROSPHERES; PROBES; TARGETS;

SENSORS;

EID: 75749087290 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3292684 Document Type: Review

Times cited : (18)

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