Field-induced modifications of hydrogenated diamond-like carbon films using a scanning probe microscope

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 2160-2165

  Frolov, V D ^a   Konov, V I ^a   Pimenov, S M ^a   Zavedeev, E V ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

DLC films; Geometrical and electrical properties characterization; Nanolithography; Nanostructures

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; HYDROGENATION; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDATION; SURFACE ROUGHNESS;

ELECTRICAL PROPERTIES; HIGHLY ORIENTED PYROLYTIC GRAPHITE (HOPG); SCANNING PROBE MICROSCOPES; SPREADING RESISTANCE IMAGING (SRI);

DIAMOND LIKE CARBON FILMS;

EID: 7544222394     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.08.004     Document Type: Conference Paper

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