Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route

Nanotechnology

Volumn 21, Issue 6, 2010, Pages

  Ridaoui, Hassan ^a   Wieder, Fernand ^a   Ponche, Arnaud ^a   Soppera, Olivier ^a  

^a UNIVERSITÉ DE HAUTE ALSACE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ARF LASER; CRYSTALLINE STRUCTURE; DUV-LASERS; HIGH REFRACTIVE INDEX; INORGANIC NANOSTRUCTURES; METAL ALKOXIDES; METAL OXIDES; NANO SCALE; NEGATIVE TONE RESIST; PERIODIC NANOSTRUCTURE; PHOTO PATTERNING; PHYSICOCHEMICAL PROPERTY; SOL-GEL CHEMISTRY; SOL-GEL ROUTES; SOL-GEL THIN FILMS; THERMAL TREATMENT; TIO; XPS;

CHEMICAL MODIFICATION; CHEMICAL PROPERTIES; GELS; METALLIC COMPOUNDS; NANOSTRUCTURES; PHOTOMASKS; REFRACTIVE INDEX; SOL-GEL PROCESS; SOL-GELS; SOLS;

HEAT TREATMENT;

EID: 75249085895     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/6/065303     Document Type: Article

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