Direct measurement of local volume change in ion-irradiated and annealed SiC

Journal of Applied Physics

Volumn 106, Issue 12, 2009, Pages

  Bae, In Tae ^a   Weber, William J ^b   Zhang, Yanwen ^b  

^a BINGHAMTON UNIVERSITY   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STATE; ATOMIC VOLUMES; DEPTH PROFILE; DIRECT MEASUREMENT; IMPLANTED SAMPLES; LOCAL DISORDER; LOCAL VOLUME CHANGE; RUTHERFORD BACK-SCATTERING SPECTROMETRY; VOLUME EXPANSION;

ENERGY DISSIPATION; IRRADIATION; PLATINUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 73849122161     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3272808     Document Type: Article

References (25)

1. W. Schenk and H. Nabielek, Nucl. Technol. 0029-5450 96, 323 (1999).
2. L. H. Rovner and G. R. Hopkins, Nucl. Technol. 0029-5450 29, 274 (1976).
3. R. H. Jones, L. L. Snead, A. Kohyama, and P. Fenici, Fusion Eng. Des. 0920-3796 41, 15 (1998). 10.1016/S0920-3796(98)00285-3
4. H. Tatlisu, M. Bastuerk, H. Rauch, and M. Trinker, Mater. Struct. 1359-5997 15, 13 (2008).
5. C. Raynaud, J. Non-Cryst. Solids 0022-3093 280, 1 (2001). 10.1016/S0022-3093(00)00350-1
6. R. Nipoti, E. Albertazzi, M. Bianconi, R. Lotti, G. Lulli, M. Cervera, and A. Carnera, Appl. Phys. Lett. 0003-6951 70, 3425 (1997). 10.1063/1.119191
7. Y. Zhang, I. -T. Bae, K. Sun, C. Wang, M. Ishimaru, Z. Zhu, W. Jiang, and W. J. Weber, J. Appl. Phys. 0021-8979 105, 104901 (2009). 10.1063/1.3118582
8. W. Jiang, C. M. Wang, W. J. Weber, M. H. Engelhard, and L. V. Saraf, J. Appl. Phys. 0021-8979 95, 4687 (2004). 10.1063/1.1690102
9. V. Heera, J. Stoemenos, R. Kögler, and W. Skorupa, J. Appl. Phys. 0021-8979 77, 2999 (1995). 10.1063/1.358649
10. L. L. Snead and S. J. Zinkle, Nucl. Instrum. Methods Phys. Res. B 0168-583X 191, 497 (2002). 10.1016/S0168-583X(02)00599-2 (Pubitemid 34617554)
11. M. Ishimaru, I. -T. Bae, Y. Hirotsu, S. Matsumara, and K. E. Sickafus, Phys. Rev. Lett. 0031-9007 89, 055502 (2002). 10.1103/PhysRevLett.89.055502
12. C. M. Wang, Y. Zhang, W. J. Weber, W. Jiang, and L. E. Thomas, J. Mater. Res. 0884-2914 18, 772 (2003). 10.1557/JMR.2003.0107
13. C. J. McHargue and J. M. Williams, Nucl. Instrum. Methods Phys. Res. B 0168-583X 80-81, 889 (1993). 10.1016/0168-583X(93)90703-9
14. A. Höfgen, V. Heera, F. Eichhorn, and W. Skorupa, J. Appl. Phys. 0021-8979 84, 4769 (1998). 10.1063/1.368801
15. Y. Zhang, W. J. Weber, W. Jiang, C. M. Wang, A. Halĺn, and G. Possnert, J. Appl. Phys. 0021-8979 93, 1954 (2003). 10.1063/1.1537451
16. D. B. Williams and C. B. Carter, Transmission Electron Microscopy (Plenum, New York, 1996).
17. M. Ishimaru, I. -T. Bae, A. Hirata, Y. Hirotsu, J. A. Valdez, and K. E. Sickafus, Phys. Rev. B 0163-1829 72, 024116 (2005). 10.1103/PhysRevB.72.024116 (Pubitemid 41509310)
18. I. -T. Bae, W. Jiang, C. Wang, W. J. Weber, and Y. Zhang, J. Appl. Phys. 0021-8979 105, 083514 (2009). 10.1063/1.3106606
19. J. F. Ziegler, J. P. Biersack, and M. D. Ziegler, The Stopping and Range of Ions in Matter (SRIM Co., Chester, 2008), J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), v. 1, 321 pp.
20. R. Devanathan, W. J. Weber, and F. Gao, J. Appl. Phys. 0021-8979 90, 2303 (2001). 10.1063/1.1389523 (Pubitemid 33600645)
21. I. -T. Bae, M. Ishimaru, Y. Hirotsu, and K. E. Sickafus, J. Appl. Phys. 0021-8979 96, 1451 (2004). 10.1063/1.1766093
22. W. Jiang, Y. Zhang, and W. J. Weber, Phys. Rev. B 0163-1829 70, 165208 (2004). 10.1103/PhysRevB.70.165208 (Pubitemid 40100467)
23. Y. Zhang, F. Gao, W. Jiang, D. E. McCready, and W. J. Weber, Phys. Rev. B 0163-1829 70, 125203 (2004). 10.1103/PhysRevB.70.125203
24. F. Gao and W. J. Weber, J. Mater. Res. 0884-2914 18, 1877 (2003). 10.1557/JMR.2003.0262
25. Y. Zhang, W. J. Weber, W. Jiang, C. M. Wang, V. Shutthanandan, and A. Halĺn, J. Appl. Phys. 0021-8979 95, 4012 (2004). 10.1063/1.1666974