Correction of higher order geometrical aberration by triple 3-fold astigmatism field

Journal of Electron Microscopy

Volumn 58, Issue 6, 2009, Pages 341-347

  Sawada, Hidetaka ^a,b   Sasaki, Takeo ^a,b   Hosokawa, Fumio ^b   Yuasa, Shuuichi ^b   Terao, Mitsuhisa ^b   Kawazoe, Muneyuki ^b   Nakamichi, Tomohiro ^b   Kaneyama, Toshikatsu ^a,b   Kondo, Yukihito ^b   Kimoto, Koji ^a,c   Suenaga, Kazutomo ^a,d  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b JEOL LTD   (Japan)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aberration correction; Delta; Ronchigram; Six fold astigmatism; Trajectory

Indexed keywords

ACCELERATION; ASPHERICS; SPHERES; TRANSMISSION ELECTRON MICROSCOPY;

ABERRATION CORRECTION; DELTA; HIGH-ORDER; HIGHER ORDER ABERRATIONS; HIGHER-ORDER; IMAGE FORMING; RONCHIGRAMS; SIX-FOLD ASTIGMATISM; SPHERICAL ABERRATION CORRECTION; UNIFORM PHASE;

ABERRATIONS;

EID: 73449126868     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfp033     Document Type: Article

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