5-axis control ultra-precision machining of complex-shaped mirrors for extreme ultraviolet lithography system

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 123-126

  Takino, H ^a   Kawai, T ^b   Takeuchi, Y ^c  

^a NIKON CORPORATION   (Japan)

^b Tokyo Institute of Technology   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Fly eye mirror; Milling; Ultra precision

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; MANUFACTURE; MILLING (MACHINING);

REFLECTIVE SURFACES; SPHERICAL MIRROR; SPHERICAL SURFACE; TOOL SHAPES; ULTRA PRECISION; ULTRAPRECISION MACHINING;

MIRRORS;

EID: 73249137353     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.031     Document Type: Article

References (9)

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