Ultraprecision 5-axis control machining of fly-eye mirror in EUV lithography

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 47, Issue 3, 2004, Pages 916-924

  Hashimoto, Yoshinori ^a   Takeuchi, Yoshimi ^b   Kawai, Tomohiko ^c   Sawada, Kiyoshi ^c   Takino, Hideo ^d   Nomura, Kazushi ^d  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c Tokyo Institute of Technology   (Japan)

^d NIKON CORPORATION   (Japan)

Author keywords

5 Axis control machining; Diamond tool; Fly eye mirror; Ultraprecision machining

Indexed keywords

CONTROL SYSTEMS; MANUFACTURE; MIRRORS; SINGLE CRYSTALS;

CONTROL MILLING; MIRROR ELEMENTS; ULTRAPRECISION;

MILLING (MACHINING);

INDUSTRIAL APPLICATION;

EID: 8744236996     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.47.916     Document Type: Article

References (6)

1. Setoya, H., Semiconductor Industry and Precision Engineering, J. Jpn. Soc. Prec. Eng., (in Japanese), Vol.67, No.1 (2001), pp.34-37.
2. Takino, H., Kobayashi, T., Yamamoto, T., Shibata, N., Gomei, Y. and Sugisaki, K., Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machining, Proc. of 10th ICPE, Yokohama, (2001), pp.67-71.
3. Komatsuda, H., Novel Illumination System for EUVL, Proc. SPIE, Vol.3991 (2000), pp.765-776.
4. Takino, H., Kobayashi, T., Shibata, N., Kuki, M. and Komatsuda, H., Fabrication of a Fly-Eye Mirror for an Extreme Ultraviolet Lithography Illumination System, Proc. SPIE, Vol.4343 (2001), pp.576-584.
5. Sornsuwit, N., Miyagawa, O., Takeuchi, Y., Kawai, T., Sawada, K. and Sata, T., Manufacture of Aspherical Convex Fresnel Lens with Ideal Cross-Sectional Profile, Trans. Jpn. Soc. Mech. Eng., in Japanese, Vol.66, No.651 (2000), pp.3754-3759.
6. Sawada, K. and Takeuchi, Y., Ultraprecision Machining Center and Micromachining, (in Japanese), (1998), NIKKAN KOGYO SHIMBUN, LTD.