Non-adhesive direct bonding of tiny parts by means of ultraprecision trapezoid microgrooves

Microsystem Technologies

Volumn 7, Issue 1, 2001, Pages 6-10

  Takeuchi, Y ^a   Miyagawa, O ^a   Kawai, T ^b   Sawada, K ^b   Sata, T ^c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b Tokyo Institute of Technology   (Japan)

^c TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042907240     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000066     Document Type: Article

References (6)

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2. Neu S; Seliger G (1995) A process model for elastomer-metal-pressfits. Annals of the CIRP 44/1: 15-18
3. Reinhart G; Höhn M (1997) Growth into miniaturization -flexible micro-assembly automation. Annals of the CIRP 46/1: 7-10
4. Sawada K; Kawai T; Takeuchi Y; Sata T (2000) Development of ultraprecision micro grooving (Manufacture of V-shaped groove). JSME Int J Series C, 43(1): 170-176
5. Sawada K; Odaka S; Kawai T; Hirai T; Takeuchi Y; Sata T (1999) Manufacture of diffraction grating on tiny parts by means of ultraprecision milling. Microsystem Technologies 5(4): 157-160
6. Takeuchi Y; Sawada K; Sata T (1996) Ultraprecision 3-D micromachining of glass. Annals of the CIRP 45/1: 401-404