Creation of ultra-precision microstructures with high aspect ratios

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 1, 2006, Pages 107-110

  Takeuchi, Y ^a   Suzukawa, H ^b   Kawai, T ^c   Sakaida, Y ^c  

^a OSAKA UNIVERSITY   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^c Tokyo Institute of Technology   (Japan)

Author keywords

Diamond milling; Micromachining; Microstructure

Indexed keywords

ASPECT RATIO; DIAMOND CUTTING TOOLS; MICROACTUATORS; MICROMACHINING; SINGLE CRYSTALS;

DIAMOND MILLING; MICRO-ROBOTS; MICRONEEDLES; ULTRA-PRECISION MILLING;

MICROSTRUCTURE;

EID: 33750054720     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60377-1     Document Type: Article

References (9)

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