Optimization of focused ion beam performance

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2654-2659

  Hagen, C W ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR CURRENT DENSITY; CHROMATIC ABERRATION; EMISSION CURRENT; FOCUSED-ION-BEAM SYSTEM; GUN LENS; OBJECTIVE LENS; PROBE CURRENTS; PROBE SIZE; SPHERICAL ABERRATIONS;

ABERRATIONS; FOCUSED ION BEAMS; HELIUM; LENSES; OPTICAL INSTRUMENTS; PARAMETER ESTIMATION;

PROBES;

EID: 72849132819     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3237132     Document Type: Conference Paper

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