Influence of Coulomb interactions on choice of magnification, aperture size, and source brightness in a two lens focused ion beam column

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 1635-1641

  Kruit, P ^a   Jiang, X R ^a,b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039666998     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589203     Document Type: Article

References (19)

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