Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 439-442

  Bi, J ^a   Jiang, X R ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ION SOURCES; MAGNETIC LENSES; PARTICLE OPTICS;

COULOMB INTERACTION; FOCUSSED ION BEAM; LIQUID METAL ION SOURCE;

ION BEAMS;

EID: 0031070141     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00180-3     Document Type: Article

References (11)

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9. X.R. Jiang, Coulomb Interactions in Charged Particle Optical Column, PhD thesis, Delft University of Technology, the Netherlands, 1996.
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11. G.H. Jansen, Coulomb Interactions in Particle Beams, Advances in Electronics and Electron Physics, suppl.21 (Academic Press, London, 1991).