Toroidal spectrometer for signal detection in scanning ion/electron microscopes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3226-3231

  Hoang, H Q ^a   Khursheed, A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR SPREADS; BACKSCATTERED ELECTRONS; DETECTION SYSTEM; RELATIVE ENERGIES; SCANNING ELECTRON MICROSCOPES; SECOND-ORDER FOCUSING; SEM; TOROIDAL SPECTROMETER;

BLIND SOURCE SEPARATION; ELECTRON OPTICS; ELECTROSTATIC LENSES; LENSES; SCANNING; SCANNING ELECTRON MICROSCOPY; SPECTROMETERS; SPECTROMETRY;

MICROSCOPES;

EID: 72849125919     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3250202     Document Type: Conference Paper

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