A new type of scanning electron microscope using the coaxial backscattered electrons

Micron

Volumn 33, Issue 1, 2002, Pages 69-74

  Jiang, C Z ^a,b   Morin, P ^b   Rosenberg, N ^b  

^a WUHAN UNIVERSITY   (China)

^b UNIVERSITÉ LYON 1   (France)

Author keywords

Backscattered electron; Backscattering coefficient; Coaxial detection; Composition analysis; Monte Carlo simulation; Scanning electron microscope

Indexed keywords

ARTICLE;

EID: 0036028114     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(00)00062-7     Document Type: Article

References (12)

1. Electron scattering in thick targets
2. Contrast enhancement from single atoms and from crystals using energy analysis
3. The spatial distribution and resolution of coaxial backscattered electron in SEM calculated by Monte Carlo simulations
4. Stereoscopic observation in SEM using multiple detectors
5. The construction and uses of an efficient back-scattered electron detector for SEM
6. Monte Carlo simulations of coaxial backscattered electrons in SEM
7. New contrast mechanism for scanning electron microscope
8. Backscattered electron image (BSI) in the scanning electron microscope (SEM)