Monte Carlo simulations of coaxial backscattered electrons in SEM

Ultramicroscopy

Volumn 76, Issue 3, 1999, Pages 97-105

  Rosenberg, N ^a   Jiang, C Z ^a   Morin, P ^a  

^a UNIVERSITÉ LYON 1   (France)

Author keywords

Reflection electron microscopy (REM); Scanning electron microscopy (SEM)

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELECTRON ENERGY ANALYZERS; ELECTRON SCATTERING; MONTE CARLO METHODS; PARTICLE DETECTORS;

ELECTRON BACKSCATTERING; REFLECTION ELECTRON MICROSCOPY (REM);

SCANNING ELECTRON MICROSCOPY;

ARTICLE; CONTRAST ENHANCEMENT; ELECTRON DIFFRACTION; ELECTRON TRANSPORT; IONIZATION; OPTICAL RESOLUTION; SCANNING ELECTRON MICROSCOPY; SIGNAL NOISE RATIO; SIMULATION; SYSTEM ANALYSIS;

EID: 0345320218     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(98)00077-1     Document Type: Article

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