Preparation of diamond-shaped channels in SU-8 for optical control of the filling state

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3078-3081

  Mollenbeck S ^a   Bogdanski, N ^a   Mayer, A ^a   Scheer, H C ^a   Zajadacz, J ^b   Zimmer, K ^b  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS SECTION; FILLING MATERIALS; FUNCTIONALITY TESTS; INCIDENT LIGHT; MICRO-FLUIDIC DEVICES; NEW CONCEPT; OPTICAL CONTROL; ORGANIC MEDIA;

OPTICAL MICROSCOPY; REFRACTIVE INDEX;

CONTRAST MEDIA;

EID: 72849117605     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3237136     Document Type: Conference Paper

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