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Volumn 48, Issue 3, 2010, Pages 340-345

Design and characterization of harmonic diffractive microlens arrays with continuous relief for parallel laser direct writing

Author keywords

Diffractive microlens arrays with continuous relief; Harmonic diffraction theory; Parallel laser direct writing; Rayleigh Sommerfeld diffraction theory

Indexed keywords

AUTO-FOCUSING; DIFFRACTION THEORY; EXPOSURE DOSE; MICRO-LENS; MICRO-LENS ARRAYS; PARALLEL LASER DIRECT WRITING; RAYLEIGH; THEORETICAL MODELS; THEORETICAL RESULT; TIME FOCUSING;

EID: 72649104845     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2009.10.009     Document Type: Article
Times cited : (7)

References (17)
  • 1
    • 84893981448 scopus 로고    scopus 로고
    • A microlens direct-write concept for lithography
    • Dacidson M. A microlens direct-write concept for lithography. SPIE 3048 (1997) 346-355
    • (1997) SPIE , vol.3048 , pp. 346-355
    • Dacidson, M.1
  • 2
    • 0034314708 scopus 로고    scopus 로고
    • Lithographic patterning and confocal imaging with zone plates
    • Gil D., Carter D.J.D., Menon R., and Smith H.I. Lithographic patterning and confocal imaging with zone plates. J Vac Sci Technol B 18 6 (2000) 2881-2885
    • (2000) J Vac Sci Technol B , vol.18 , Issue.6 , pp. 2881-2885
    • Gil, D.1    Carter, D.J.D.2    Menon, R.3    Smith, H.I.4
  • 3
    • 33645385648 scopus 로고    scopus 로고
    • Experimental characterization of focusing by high-numerical-aperture zone plates
    • Menon R., Gil D., and Smith H.I. Experimental characterization of focusing by high-numerical-aperture zone plates. J Opt Soc Am A 23 (2006) 567-571
    • (2006) J Opt Soc Am A , vol.23 , pp. 567-571
    • Menon, R.1    Gil, D.2    Smith, H.I.3
  • 4
    • 34547395965 scopus 로고    scopus 로고
    • Model analysis of effect of diffraction focus characteristics of microlens arrays on parallel laser direct writing quality
    • Tan J., Shan M., Liu J., et al. Model analysis of effect of diffraction focus characteristics of microlens arrays on parallel laser direct writing quality. Opt Commun 277 (2007) 237-240
    • (2007) Opt Commun , vol.277 , pp. 237-240
    • Tan, J.1    Shan, M.2    Liu, J.3
  • 5
    • 48949097629 scopus 로고    scopus 로고
    • Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing
    • Tan J., Shan M., and Liu J. Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing. Appl Opt 47 (2008) 1430-1433
    • (2008) Appl Opt , vol.47 , pp. 1430-1433
    • Tan, J.1    Shan, M.2    Liu, J.3
  • 6
    • 84893890786 scopus 로고
    • Harmonic diffractive lenses
    • Sweeney D.W., and Sommargren G.E. Harmonic diffractive lenses. Appl Opt 34 (1995) 2469-2475
    • (1995) Appl Opt , vol.34 , pp. 2469-2475
    • Sweeney, D.W.1    Sommargren, G.E.2
  • 7
    • 84975602171 scopus 로고
    • Spectral properties of multiorder diffractive lenses
    • Faklis D., and Morris G.M. Spectral properties of multiorder diffractive lenses. Appl Opt 34 (1995) 2462-2468
    • (1995) Appl Opt , vol.34 , pp. 2462-2468
    • Faklis, D.1    Morris, G.M.2
  • 8
    • 0005342435 scopus 로고    scopus 로고
    • Diffractive-refractive behavior of kinoform lenses
    • Sales T.R.M., and Morris G.M. Diffractive-refractive behavior of kinoform lenses. Appl Opt 36 (1997) 253-257
    • (1997) Appl Opt , vol.36 , pp. 253-257
    • Sales, T.R.M.1    Morris, G.M.2
  • 9
    • 45449093801 scopus 로고    scopus 로고
    • Optical design of a HDE infrared dual-band step-zoom system
    • Dong K., Pan Y., Wang X., et al. Optical design of a HDE infrared dual-band step-zoom system. Opt Precis Eng 16 5 (2008) 764-770
    • (2008) Opt Precis Eng , vol.16 , Issue.5 , pp. 764-770
    • Dong, K.1    Pan, Y.2    Wang, X.3
  • 10
    • 0001504337 scopus 로고    scopus 로고
    • Free-space beam propagation between arbitrarily oriented planes based on full diffraction theory: a fast Fourier transform approach
    • Delen N., and Hooker B. Free-space beam propagation between arbitrarily oriented planes based on full diffraction theory: a fast Fourier transform approach. J Opt Soc Am A 15 (1998) 857-867
    • (1998) J Opt Soc Am A , vol.15 , pp. 857-867
    • Delen, N.1    Hooker, B.2
  • 11
    • 0001570505 scopus 로고
    • Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
    • Gale M.T., Rossi M., Pedersen J., and Schutz H. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists. Opt Eng 33 (1994) 3556-3566
    • (1994) Opt Eng , vol.33 , pp. 3556-3566
    • Gale, M.T.1    Rossi, M.2    Pedersen, J.3    Schutz, H.4
  • 12
    • 30844440986 scopus 로고    scopus 로고
    • Zone-boundary optimization for direct laser writing of continuous-relief diffractive optical elements
    • Korolkov V.P., Nasyrov R.K., and Shimansky R.V. Zone-boundary optimization for direct laser writing of continuous-relief diffractive optical elements. Appl Opt 45 (2006) 53-62
    • (2006) Appl Opt , vol.45 , pp. 53-62
    • Korolkov, V.P.1    Nasyrov, R.K.2    Shimansky, R.V.3
  • 13
    • 4944264369 scopus 로고    scopus 로고
    • Optimization of diffraction grating profiles in fabrication by electron-beam lithography
    • Okano M., Kikuta H., Hirai Y., Yamamoto K., and Yotsuya T. Optimization of diffraction grating profiles in fabrication by electron-beam lithography. Appl Opt 43 (2004) 5137-5142
    • (2004) Appl Opt , vol.43 , pp. 5137-5142
    • Okano, M.1    Kikuta, H.2    Hirai, Y.3    Yamamoto, K.4    Yotsuya, T.5
  • 14
    • 0000768854 scopus 로고    scopus 로고
    • Diffractive optical elements with continuous relief fabricated by focused ion beam for monomode fiber coupling
    • Yong-Qi F., Kok Ann Bryan N., and Shing O. Diffractive optical elements with continuous relief fabricated by focused ion beam for monomode fiber coupling. Opt Express 7 (2000) 141-147
    • (2000) Opt Express , vol.7 , pp. 141-147
    • Yong-Qi, F.1    Kok Ann Bryan, N.2    Shing, O.3
  • 15
    • 0029403845 scopus 로고
    • Improvements in diffraction efficiency of gratings and microlenses with continuous relief structures
    • Kuittinen M., Herzig H.P., and Ehbets P. Improvements in diffraction efficiency of gratings and microlenses with continuous relief structures. Opt Commun 120 (1995) 230-234
    • (1995) Opt Commun , vol.120 , pp. 230-234
    • Kuittinen, M.1    Herzig, H.P.2    Ehbets, P.3
  • 16
    • 0001446977 scopus 로고    scopus 로고
    • Analysis and optimization of fabrication of continuous-relief diffractive optical elements
    • Hessler T., Rossi M., Kunz R.E., and Gale M.T. Analysis and optimization of fabrication of continuous-relief diffractive optical elements. Appl Opt 37 (1998) 4069-4079
    • (1998) Appl Opt , vol.37 , pp. 4069-4079
    • Hessler, T.1    Rossi, M.2    Kunz, R.E.3    Gale, M.T.4
  • 17
    • 0031096692 scopus 로고    scopus 로고
    • Microlens arrays for confocal microscopy
    • Tiziani H.J., Achi R., Krämer R.N., et al. Microlens arrays for confocal microscopy. Opt Laser Technol 29 2 (1997) 85-91
    • (1997) Opt Laser Technol , vol.29 , Issue.2 , pp. 85-91
    • Tiziani, H.J.1    Achi, R.2    Krämer, R.N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.