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Volumn 47, Issue 1, 2010, Pages 129-133
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Fabrication and spectroscopy of GaN microcavities made by epitaxial lift-off
d
CRHEA CNRS
(France)
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Author keywords
Aluminium indium nitride; Gallium nitride; Microcavity; Photoluminescence; Reflectance; Wet etching
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Indexed keywords
ALUMINIUM INDIUM NITRIDE;
EPITAXIAL LIFTOFF;
GAN TEMPLATE;
HIGH QUALITY;
III-NITRIDES;
INDIUM NITRIDE;
OPTICALLY SMOOTH SURFACES;
PLANAR MICROCAVITY;
REFLECTIVITY SPECTRA;
ROOT MEAN SQUARE ROUGHNESS;
SELECTIVE REMOVAL;
TRILAYERS;
ACIDS;
ALUMINUM;
GALLIUM NITRIDE;
INDIUM;
MICROCAVITIES;
NITRIC ACID;
PHOTOLUMINESCENCE;
REFLECTION;
SEMICONDUCTING GALLIUM;
WET ETCHING;
GALLIUM ALLOYS;
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EID: 72449122798
PISSN: 07496036
EISSN: 10963677
Source Type: Journal
DOI: 10.1016/j.spmi.2009.07.001 Document Type: Article |
Times cited : (2)
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References (10)
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