Ordering and disordering of macropores formed in prepatterned p-type silicon

Journal of the Electrochemical Society

Volumn 157, Issue 1, 2010, Pages

  Okayama, Haruaki ^a   Fukami, Kazuhiro ^a   Plugaru, Rodica ^b   Sakka, Tetsuo ^a   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZATIONS; APPLIED CURRENT; CURRENT DISTRIBUTION; ETCH PITS; MACROPORE FORMATION; MACROPORES; ORDERING AND DISORDERING; P-TYPE SILICON; PATTERN SIZE; PORE FORMATION; SILICON NANOWIRES;

PORE SIZE;

ELECTRIC FIELDS;

EID: 72249104067     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3256126     Document Type: Article

References (13)

1. V. Lehmann and H. Föll, J. Electrochem. Soc. 0013-4651, 137, 653 (1990). 10.1149/1.2086525
2. S. Ottow, V. Lehmann, and H. Föll, J. Electrochem. Soc. 0013-4651, 143, 385 (1996). 10.1149/1.1836442
3. E. K. Propst and P. A. Kohl, J. Electrochem. Soc. 0013-4651, 141, 1006 (1994). 10.1149/1.2054832
4. R. B. Wehrspohn, J. N. Chazalviel, and F. Ozanam, J. Electrochem. Soc. 0013-4651, 145, 2958 (1998). 10.1149/1.1838744
5. E. A. Ponomarev and C. Levy-Clement, Electrochem. Solid-State Lett. 1099-0062, 1, 42 (1998). 10.1149/1.1390629
6. M. Christophersen, J. Carstensen, A. Feuerhake, and H. Föll, Mater. Sci. Eng., B 0921-5107, 69-70, 194 (2000). 10.1016/S0921-5107(99)00262-7 (Pubitemid 30552093)
7. V. Lehmann and S. Rönnebeck, J. Electrochem. Soc. 0013-4651, 146, 2968 (1999). 10.1149/1.1392037
8. K. J. Chao, S. C. Kao, C. M. Yang, M. S. Hseu, and T. G. Tsai, Electrochem. Solid-State Lett. 1099-0062, 3, 489 (2000). 10.1149/1.1391188 (Pubitemid 30967235)
9. A. Vyatkin, V. Starkov, V. Tzeitlin, H. Presting, J. Konle, and U. König, J. Electrochem. Soc. 0013-4651, 149, G70 (2002). 10.1149/1.1424898 (Pubitemid 34307147)
10. J. E. A. M. van den Meerakker, R. J. G. Elfrink, W. M. Weeda, and F. Roozeboom, Phys. Status Solidi A 0031-8965, 197, 57 (2003). 10.1002/pssa. 200306468
11. E. V. Astrova, T. N. Borovinskaya, A. V. Tkachenko, S. Balarkrishnan, T. S. Perova, A. Rafferty, and Y. K. Gun'ko, J. Micromech. Microeng. 0960-1317, 14, 1022 (2004). 10.1088/0960-1317/14/7/024
12. J. N. Chazalviel, F. Ozanam, N. Gabouze, S. Fellah, and R. B. Wehrspohn, J. Electrochem. Soc. 0013-4651, 149, C511 (2002). 10.1149/1.1507594 (Pubitemid 35303289)
13. K. Kobayashi, F. A. Harraz, S. Izuo, T. Sakka, and Y. H. Ogata, Phys. Status Solidi A 0031-8965, 204, 1321 (2007). 10.1002/pssa.200674325 (Pubitemid 47119984)