SCOPUS 정보 검색 플랫폼

Journal of the Electrochemical Society

Volumn 157, Issue 1, 2010, Pages

Thermal stability of acrylic/methacrylic sacrificial copolymers fabricated by initiated chemical vapor deposition

(2) Ozaydin Ince, Gozde a Gleason, Karen K a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; COPOLYMER FILMS; DIACRYLATES; ETHYLENE GLYCOL DIMETHACRYLATE; HOMOPOLYMERS; LOW-K MATERIALS; ONSET TEMPERATURE; POLYMER SYSTEMS; RADICAL CONCENTRATION; SACRIFICIAL MATERIAL; THERMAL ANNEALS; THERMAL DECOMPOSITIONS; THERMAL STABILITY; THERMAL STABILITY STUDIES;

CHEMICAL STABILITY; CHEMICAL VAPOR DEPOSITION; COPOLYMERIZATION; COPOLYMERS; DEPOSITION; ETHYLENE; ETHYLENE GLYCOL; INTEGRATED CIRCUITS; LITHIUM COMPOUNDS; PHOTORESISTS; PYROLYSIS; SYSTEM STABILITY; THERMODYNAMIC STABILITY;

PLASTIC PRODUCTS;

EID: 72249092963 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3251308 Document Type: Article

Times cited : (15)

References (12)

1
- 34248679915
- The evolution of multi-level air gap integration towards 32 nm node interconnects
- DOI 10.1016/j.mee.2007.04.119, PII S0167931707004923, INFOS 2007
- R. Daamen, P. H. L. Bancken, V. H. Nguyen, A. Humbert, G. J. A. M. Verheijden, and R. J. O. M. Hoofman, Microelectron. Eng. 0167-9317, 84, 2177 (2007). 10.1016/j.mee.2007.04.119 (Pubitemid 46777021)
- (2007) Microelectronic Engineering , vol.84 , Issue.9-10 , pp. 2177-2183
- Daamen, R.¹ Bancken, P.H.L.² Nguyen, V.H.³ Humbert, A.⁴ Verheijden, G.J.A.M.⁵ Hoofman, R.J.O.M.⁶

2
- 12344330374
- Improved fabrication of micro air-channels by incorporation of a structural barrier
- DOI 10.1088/0960-1317/15/1/006
- P. J. Joseph, H. A. Kelleher, S. A. B. Allen, and P. A. Kohl, J. Micromech. Microeng. 0960-1317, 15, 35 (2005). 10.1088/0960-1317/15/1/006 (Pubitemid 40121475)
- (2005) Journal of Micromechanics and Microengineering , vol.15 , Issue.1 , pp. 35-42
- Joseph, P.J.¹ Kelleher, H.A.² Bidstrup Allen, S.A.³ Kohl, P.A.⁴

3
- 33644804848
- Air-gap fabrication using a sacrificial polymeric thin film synthesized via initiated chemical vapor deposition
- DOI 10.1149/1.2168297
- K. Chan and K. K. Gleason, J. Electrochem. Soc. 0013-4651, 153, C223 (2006). 10.1149/1.2168297 (Pubitemid 43352241)
- (2006) Journal of the Electrochemical Society , vol.153 , Issue.4
- Chan, K.¹ Gleason, K.K.²

4
- 40549093381
- Cross-linked organic sacrificial material for air gap formation by initiated chemical vapor deposition
- DOI 10.1149/1.2837838
- L. H. Lee and K. K. Gleason, J. Electrochem. Soc. 0013-4651, 155, G78 (2008). 10.1149/1.2837838 (Pubitemid 351357514)
- (2008) Journal of the Electrochemical Society , vol.155 , Issue.4
- Lee, L.H.¹ Gleason, K.K.²

5
- 0035525690
- 1099-0062, 10.1149/1.1402496
- L. S. Loo and K. K. Gleason, Electrochem. Solid-State Lett. 1099-0062, 4, G81 (2001). 10.1149/1.1402496
- (2001) Electrochem. Solid-State Lett. , vol.4 , pp. 81
- Loo, L.S.¹ Gleason, K.K.²

6
- 31644446371
- Effect of substrate temperature on the plasma polymerization of poly(methyl methacrylate)
- DOI 10.1002/cvde.200506409
- T. B. Casserly and K. K. Gleason, Chem. Vap. Deposition 0948-1907, 12, 59 (2006). 10.1002/cvde.200506409 (Pubitemid 43171371)
- (2006) Chemical Vapor Deposition , vol.12 , Issue.1 , pp. 59-66
- Casserly, T.B.¹ Gleason, K.K.²

7
- 33744462659
- Initiated Chemical Vapor Deposition (iCVD) of poly(alkyl acrylates): An experimental study
- DOI 10.1021/ma0601619
- K. K. S. Lau and K. K. Gleason, Macromolecules 0024-9297, 39, 3688 (2006). 10.1021/ma0601619 (Pubitemid 43798249)
- (2006) Macromolecules , vol.39 , Issue.10 , pp. 3688-3694
- Lau, K.K.S.¹ Gleason, K.K.²

8
- 33744481819
- Initiated Chemical Vapor Deposition (iCVD) of poly(alkyl acrylates): A kinetic model
- DOI 10.1021/ma0601621
- K. K. S. Lau and K. K. Gleason, Macromolecules 0024-9297, 39, 3695 (2006). 10.1021/ma0601621 (Pubitemid 43803711)
- (2006) Macromolecules , vol.39 , Issue.10 , pp. 3695-3703
- Lau, K.K.S.¹ Gleason, K.K.²

9
- 70349137512
- 0734-2101, 10.1116/1.3168553
- G. Ozaydin-Ince and K. K. Gleason, J. Vac. Sci. Technol. A 0734-2101, 27, 5 (2009). 10.1116/1.3168553
- (2009) J. Vac. Sci. Technol. A , vol.27 , pp. 5
- Ozaydin-Ince, G.¹ Gleason, K.K.²

10
- 0000968108
- 0013-4651, 10.1149/1.1392679
- B. Cruden, K. Chu, K. Gleason, and H. Sawin, J. Electrochem. Soc. 0013-4651, 146, 4590 (1999). 10.1149/1.1392679
- (1999) J. Electrochem. Soc. , vol.146 , pp. 4590
- Cruden, B.¹ Chu, K.² Gleason, K.³ Sawin, H.⁴

11
- 25844517208
- Initiated chemical vapor deposition of linear and cross-linked poly(2-hydroxyethyl methacrylate) for use as thin-film hydrogels
- DOI 10.1021/la051004q
- K. Chan and K. K. Gleason, Langmuir 0743-7463, 21, 8930 (2005). 10.1021/la051004q (Pubitemid 41396657)
- (2005) Langmuir , vol.21 , Issue.19 , pp. 8930-8939
- Chan, K.¹ Gleason, K.K.²

12
- 0003428491
- in, H. H. G. Jellinek, Editor, Elsevier, New York.
- I. Mita, in Aspects of Degradation and Stabilization of Polymers, H. H. G. Jellinek, Editor, Elsevier, New York (1978).
- (1978) Aspects of Degradation and Stabilization of Polymers
- Mita, I.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.