Effect of substrate temperature on the plasma polymerization of poly(methyl methacrylate)

Chemical Vapor Deposition

Volumn 12, Issue 1, 2006, Pages 59-66

  Casserly, Thomas B ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

FTIR; Plasma polymer; PMMA; Raman; Substrate temperature; Thermal properties

Indexed keywords

CROSSLINKING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; POLYMETHYL METHACRYLATES; PYROLYSIS; RAMAN SPECTROSCOPY; THERMODYNAMIC PROPERTIES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

FUNCTIONAL GROUPS; PLASMA POLYMER; RAMAN; SUBSTRATE TEMPERATURE;

PLASMA POLYMERIZATION;

EID: 31644446371     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200506409     Document Type: Review

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