18O/16O isotopic separation in anodic tantala films by glow discharge time-of-flightmass spectrometry

Surface and Interface Analysis

Volumn 41, Issue 12-13, 2009, Pages 966-973

  Tempez, A ^a   Canulescu, S ^b   Molchan, I S ^c   Dobeli M ^d   Whitby, J A ^b   Lobo, L ^e   Michler, J ^b   Thompson, G E ^c   Bordel, N ^e   Chapon, P ^a   Skeldon, P ^c   Delfanti, I ^f   Tuccitto, N ^f   Licciardello, A ^f  

^a HORIBA Jobin Yvon Inc   (United States)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

^d ETH ZURICH   (Switzerland)

^e UNIVERSITY OF OVIEDO   (Spain)

^f UNIVERSITY OF CATANIA   (Italy)

Author keywords

16O and 18O isotopes; Anodic tantala; Glow discharge time of flight mass spectrometry; Isotopic differentiation

Indexed keywords

16O AND 18O ISOTOPES; ANODIC FILMS; ANODIC TANTALA; ANODISING; ELASTIC RECOIL DETECTION ANALYSIS; ELEMENTAL DISTRIBUTION; HIGH-PURITY; ION SIGNALS; IONIC SPECIES; IONISATION; ISOTOPIC ABUNDANCES; ISOTOPIC SEPARATION; PULSE PROFILE; RADIO FREQUENCIES; RADIO FREQUENCY GLOW DISCHARGE; RF-GD-OES; TEM; TIME-RESOLVED DETECTION; ULTRATRACES;

GLOW DISCHARGES; ION SOURCES; IONS; LIGHT TRANSMISSION; LOCATION; MASS SPECTROMETERS; OPTICAL EMISSION SPECTROSCOPY; RADIO BROADCASTING; RADIO TRANSMISSION; RADIO WAVES; SECONDARY ION MASS SPECTROMETRY; SIGNAL DETECTION; SPECTROMETRY; TANTALUM; TRACE ANALYSIS; TRACE ELEMENTS; TRANSMISSION ELECTRON MICROSCOPY;

ISOTOPES;

EID: 72149114628     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3129     Document Type: Article

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