Pulsed r.f.-glow-discharge time-of-flight mass spectrometry for fast surface and interface analysis of conductive and non-conductive materials

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 292-295

  Hohl, M ^a   Kanzari, A ^a   Michler, J ^a   Nelis, T ^a   Fuhrer, K ^b   Gonin, M ^b  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b TOFWERK AG   (Switzerland)

Author keywords

Depth profiling; Pulsed r.f. glow discharge; Thin coatings; Time of flight mass spectrometry

Indexed keywords

INTERFACES (MATERIALS); LIGHT EMISSION; MASS SPECTROMETRY; OPTICAL RESOLVING POWER; TITANIUM OXIDES;

DEPTH PROFILING; PULSED R.F.-GLOW DISCHARGE; THIN COATINGS; TIME-OF-FLIGHT MASS SPECTROMETRY;

GLOW DISCHARGES;

EID: 33646553071     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2253     Document Type: Conference Paper

References (17)

1. Winchester MR, Payling R. Spectrochim. Acta, Part B 2004; 59: 607.
2. Bings NH, Costa-Fernandez JM, Guzowski JP Jr., Leach AM, Hieftje GM. Spectrochim. Acta, Part B 2000; 55: 767.
3. Kasik M, Venzago C, Dorka R. J. Anal. At. Spectrom. 2003; 18:603.
4. Pisonero J, Turney K, Bordel N, Sanz-Medel A, Harrison WW. J. Anal. At. Spectrom. 2003; 18: 624.
5. Klingler JA, Savickas PJ, Harrison WW. J. Am. Soc. Mass Spectrom. 1990; 1:138.
6. Walden WO, Hang W, Smith BW, Wineforder JD, Harrison WW. Fresenius' J. Anal. Chem. 1996; 355: 442.
7. Pan C, King FL. J. Am. Soc. Mass Spectrom. 1993; 4: 727.
8. Pan C, King FL. Appl. Spectrosc. 1993; 47(12): 2096.
9. Payling R, Jones DG, Bengtson A. Glow Discharge Optical Emission Spectrometry. John Wiley and Sons: UK, 1997.
10. Nelis Th, Payling R. A Guidebook to Glow Discharge Optical Emission Spectroscopy. RSC Publishing: 2004, ISBN 085404521X.
11. Li L, Millay JT, Turner JP, King FL. J. Am. Soc. Mass Spectrom. 2004; 15: 87.
12. Nelis Th, Aeberhard M, Hohl M, Rohr L, Michler J. J. Anal. At. Spectrom. 2005 (in press).
13. Shimizu K, Habazaki H, Skeldon P, Thompson G. Surf. Interface Anal. 2003; 35: 7.
14. Michler J, Aeberhard M, Velten D, Winter S, Payling R, Breme J. Thin Solid Films 2004; 447-448: 278.
15. Kern P, Schwaller P, Michler J. Thin Solid Films 2006; 494(1-2).
16. Steiner RE, Lewis CL, King FL. Anal. Chem. 1997; 69:1715.
17. Schick CR, DePalma PA, Marcu RK. Anal. Chem. 1996; 68: 2113.