Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe

Sensors and Actuators, A: Physical

Volumn 155, Issue 1, 2009, Pages 136-144

  Ju, Bing Feng ^a   Chen, Yuan Liu ^a   Fu, Mingming ^a   Chen, Ye ^a   Yang, Yunhai ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Apex radius; Electropolishing; High aspect ratio; Immersion depth; Power off control strategy; STM probe

Indexed keywords

CONTROL STRATEGIES; ELECTROLYTE CONCENTRATION; ELECTROPOLISHING; FABRICATION TECHNIQUE; HIGH ASPECT RATIO; HIGH ASPECT RATIO STRUCTURES; HIGH QUALITY; IMMERSION DEPTH; PULSE CURRENTS; REPRODUCIBILITIES; SYSTEMATIC STUDY; TUNGSTEN WIRES; ULTRA SMOOTH SURFACE; YIELD RATES;

ELECTROLYTES; ELECTROLYTIC POLISHING; FABRICATION; PHOTORESISTS; PRESSURE DROP; PROBES; TUNGSTEN;

ASPECT RATIO;

EID: 71749086466     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.08.013     Document Type: Article

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