Realization and characterization of diamond micro-transducers for bio-chemical sensing

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 754-757

  bongrain, Alexandre ^a   Scorsone, Emmanuel ^a   Rousseau, Lionel ^b   Lissorgues, Gaëlle ^b   Saada, Samuel ^a   Bergonzo, Philippe ^a  

^a DIF   (France)

^b National Centre of Scientific Research   (France)

Author keywords

bio chemical sensing; diamond micro transducer; Poly crystalline diamond

Indexed keywords

BIO-CHEMICAL SENSING; BIOSENSING; CHEMICAL SENSING; CHEMICAL VAPOUR DEPOSITION; MEASURED DATA; MEMS-STRUCTURE; PATTERNED GROWTH; POLYCRYSTALLINE DIAMONDS; Q-FACTORS; SILICON STRUCTURES; SIMULATED DATA;

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELECTROCHEMICAL SENSORS; LASER INTERFEROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS;

DIAMONDS;

EID: 71549139415     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.188     Document Type: Conference Paper

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