Interferometric force sensing AFM probes for nanomechanical mapping of material properties

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1634-1637

  Sarioglu, A F ^a   Liu, M ^b   Solgaard, O ^a  

^a STANFORD UNIVERSITY   (United States)

^b AGILENT LABORATORIES   (United States)

Author keywords

Atomic force microscopy; Cantilever probes; Diffraction grating sensor; Higher harmonic imaging; Timeresolved tip sample interaction force

Indexed keywords

ATOMIC FORCE MICROSCOPY CANTILEVERS; CANTILEVER PROBES; HIGHER HARMONICS; TIME-RESOLVED; TIP-SAMPLE INTERACTION;

ACTUATORS; DIELECTRIC PROPERTIES; DIFFRACTION; DIFFRACTION GRATINGS; HARMONIC ANALYSIS; INTERFEROMETRY; MATERIALS PROPERTIES; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; PROBES; SOLID-STATE SENSORS; VIBRATION MEASUREMENT;

ATOMIC FORCE MICROSCOPY;

EID: 71449116497     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285773     Document Type: Conference Paper

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