Novel mems grippers capable of both grasping and active release of micro objects

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2389-2392

  Chen, B K ^a   Zhang, Y ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Active release; Adhesion forces; MEMS microgripper; Micromanipulation

Indexed keywords

ACTIVE RELEASE; ADHESION FORCES; AMBIENT ENVIRONMENT; MICRO MANIPULATION; MICRO-OBJECTS; MICRO-SCALES; MICROGRIPPER; NONCONDUCTIVE SUBSTRATES; OPTICAL MICROSCOPES; RELEASE PROCESS; RELEASE RATE;

ACTUATORS; ADHESION; BOROSILICATE GLASS; GRIPPERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SUBSTRATES;

SOLID-STATE SENSORS;

EID: 71449103244     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285454     Document Type: Conference Paper

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