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Volumn 84, Issue 1, 2006, Pages 211-218

Crystallization of sol-gel processed PZT films with low temperatures and short times using UV-Assisted rapid thermal annealing

Author keywords

Ferroelectric; PZT; Sol gel

Indexed keywords


EID: 71149087171     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580601086865     Document Type: Conference Paper
Times cited : (5)

References (15)
  • 2
    • 0000157985 scopus 로고    scopus 로고
    • Structural development in the early stages of annealing of Sol-Gel prepared lead zirconate titanate thin films
    • Z. Huang, Q. Zhang, and R. W. Whatmore, "Structural Development in the Early Stages of Annealing of Sol-Gel Prepared Lead Zirconate Titanate Thin Films," J. Appl. Phys. 86, 1662-1669 (1999).
    • (1999) J. Appl. Phys. , vol.86 , pp. 1662-1669
    • Huang, Z.1    Zhang, Q.2    Whatmore, R.W.3
  • 3
    • 21544479167 scopus 로고
    • Piezoelectric properties of Sol-Gel derived ferroelectric and antiferroelectric thin layers
    • J. F. Li, D. D. Viehland, T. Tani, C. D. E. Lakeman, and D. A. Payne, "Piezoelectric Properties of Sol-Gel Derived Ferroelectric and Antiferroelectric Thin Layers," J. Appl. Phys. 75, 442-448 (1994).
    • (1994) J. Appl. Phys. , vol.75 , pp. 442-448
    • Li, J.F.1    Viehland, D.D.2    Tani, T.3    Lakeman, C.D.E.4    Payne, D.A.5
  • 4
    • 0141530980 scopus 로고    scopus 로고
    • PZT(65/35) and PLZT(8/65/35) thin films by Sol-Gel process: A comparative study on the structural, microstructural and electrical properties
    • R. Thomas, S. Mochizuki, T. Mihara, and T. Ishida, "PZT(65/35) and PLZT(8/65/35) Thin Films by Sol-Gel Process: A Comparative Study on the Structural, Microstructural and Electrical Properties," Thin Solid Films 443, 14-22 (2003).
    • (2003) Thin Solid Films , vol.443 , pp. 14-22
    • Thomas, R.1    Mochizuki, S.2    Mihara, T.3    Ishida, T.4
  • 7
    • 1342327959 scopus 로고    scopus 로고
    • Preparation and characterization of multi-coating PZT thick films by Sol-Gel process
    • S. H. Hu, X. J. Meng, G. S. Wang, J. L. Sun, and D. X. Li, "Preparation and Characterization of Multi-coating PZT Thick Films by Sol-Gel Process," J. Ciyst. Gr., 264, 307-311 (2004).
    • (2004) J. Ciyst. Gr. , vol.264 , pp. 307-311
    • Hu, S.H.1    Meng, X.J.2    Wang, G.S.3    Sun, J.L.4    Li, D.X.5
  • 8
    • 3843140457 scopus 로고    scopus 로고
    • Electrical properties of PZT thin films grown by Sol-Gel and PLD using a seed layer
    • S. K. Pandey, A. R. James, C. Prakash, T. C. Goel, and K. Zimik, "Electrical Properties of PZT Thin Films Grown by Sol-Gel and PLD using a Seed Layer," Mater. Sci. Eng. B 112, 96-100 (2004).
    • (2004) Mater. Sci. Eng. B , vol.112 , pp. 96-100
    • Pandey, S.K.1    James, A.R.2    Prakash, C.3    Goel, T.C.4    Zimik, K.5
  • 9
    • 0037666880 scopus 로고    scopus 로고
    • Effects of polyethylene glycol) additive molecular weight on the microstructure and properties of Sol-Gel-derived lead zirconate titanate thin films
    • S. Yu, K. Yao, S. R. Shannigrahi, and F. E. H. Tay, "Effects of Polyethylene glycol) Additive Molecular Weight on the Microstructure and Properties of Sol-Gel-Derived Lead Zirconate Titanate Thin Films," J. Mater. Res. 18, 737-741 (2003).
    • (2003) J. Mater. Res. , vol.18 , pp. 737-741
    • Yu, S.1    Yao, K.2    Shannigrahi, S.R.3    Tay, F.E.H.4
  • 10
    • 0012987732 scopus 로고
    • 3 thin films by Sol Gel processing: Electrical, optical, and electro-optic properties
    • 3 Thin Films by Sol Gel Processing: Electrical, Optical, and Electro-Optic Properties," J. Appl. Phys. 64, 2717-2724 (1988).
    • (1988) J. Appl. Phys. , vol.64 , pp. 2717-2724
    • Yi, G.1    Wu, Z.2    Sayer, M.3
  • 12
    • 0036557650 scopus 로고    scopus 로고
    • Low temperature preparation of piezoelectric thin films by ultraviolet-assisted rapid thermal processing
    • L. Pardo, R. Poyato, A. Gonzalez, and M. L. Calzada, "Low Temperature Preparation of Piezoelectric Thin Films by Ultraviolet-Assisted Rapid Thermal Processing," Mater. Sci. Semi. Proc. 5, 77-84 (2003).
    • (2003) Mater. Sci. Semi. Proc. , vol.5 , pp. 77-84
    • Pardo, L.1    Poyato, R.2    Gonzalez, A.3    Calzada, M.L.4
  • 14
    • 0030171332 scopus 로고    scopus 로고
    • Solution deposition of ferroelectric thin films
    • B. A. Tuttle and R. W. Schwartz, "Solution Deposition of Ferroelectric Thin Films," Mater Res. Soc. Bull. 21, 49-54 (1996).
    • (1996) Mater Res. Soc. Bull. , vol.21 , pp. 49-54
    • Tuttle, B.A.1    Schwartz, R.W.2
  • 15
    • 0000962206 scopus 로고    scopus 로고
    • Ultraviolet photochemistry and ex situ ozonolysis of alkanethiol self-assembled monolayers on gold
    • Y. Zhang, R. H. Terrill, and P. W. Bohn, "Ultraviolet Photochemistry and ex Situ Ozonolysis of Alkanethiol Self-Assembled Monolayers on Gold," Chem Mater. 11, 2191-2198 (1999).
    • (1999) Chem Mater. , vol.11 , pp. 2191-2198
    • Zhang, Y.1    Terrill, R.H.2    Bohn, P.W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.