Low temperature preparation of piezoelectric thin films by ultraviolet-assisted rapid thermal processing

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 77-83

  Pardo, L ^a   Poyato, R ^a   Gonzalez A ^a   Calzada, M L ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PYROLYSIS; ULTRAVIOLET RADIATION;

EXCIMER LAMPS;

FERROELECTRIC THIN FILMS;

EID: 0036557650     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00087-2     Document Type: Conference Paper

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