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Volumn 41, Issue 10, 2005, Pages 3544-3549

Bidirectional ferromagnetic spiral inductors using single deposition

Author keywords

FMR; High magnetization; Inductance

Indexed keywords

DEPOSITION; FERROMAGNETIC MATERIALS; FERROMAGNETIC RESONANCE; LAMINATES; MAGNETIZATION;

EID: 27744471607     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2005.854727     Document Type: Article
Times cited : (51)

References (28)
  • 1
    • 0038546678 scopus 로고    scopus 로고
    • On the design of RF spiral inductors on silicon
    • Mar.
    • J. N. Burghartz, "On the design of RF spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 50, no. 3, pp. 718-729, Mar. 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , Issue.3 , pp. 718-729
    • Burghartz, J.N.1
  • 4
    • 0032075292 scopus 로고    scopus 로고
    • On-chip spiral inductors with patterned ground shields for Si-based RF ICs
    • C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF ICs," IEEE Solid-State Circuits, vol. 33, no. 5, pp. 743-752.
    • IEEE Solid-state Circuits , vol.33 , Issue.5 , pp. 743-752
    • Yue, C.P.1    Wong, S.S.2
  • 5
    • 0033690759 scopus 로고    scopus 로고
    • GHz magnetic film inductors
    • V. Korenivski, "GHz magnetic film inductors," J. MMM, vol. 215, pp. 800-806, 2000.
    • (2000) J. MMM , vol.215 , pp. 800-806
    • Korenivski, V.1
  • 6
    • 0028547644 scopus 로고
    • High impedance anisotropic composites manufactured from ferromagnetic thin films for microwave applications
    • Nov.
    • O. Acher, J. Jacquart, P. M. Fontaine, J. M. Baclet, and G. Perrin, "High impedance anisotropic composites manufactured from ferromagnetic thin films for microwave applications," IEEE Trans. Magn., vol. 30, no. 6, pp. 4533-4535, Nov. 1994.
    • (1994) IEEE Trans. Magn. , vol.30 , Issue.6 , pp. 4533-4535
    • Acher, O.1    Jacquart, J.2    Fontaine, P.M.3    Baclet, J.M.4    Perrin, G.5
  • 7
  • 8
    • 0001486412 scopus 로고    scopus 로고
    • Control of the resonance frequency of soft ferromagnetic films by strip patterning
    • G. Perrin, J. C. Peuzin, and O. Acher, "Control of the resonance frequency of soft ferromagnetic films by strip patterning," J. Appl. Phys., vol. 8, pp. 5166-5168, 1997.
    • (1997) J. Appl. Phys. , vol.8 , pp. 5166-5168
    • Perrin, G.1    Peuzin, J.C.2    Acher, O.3
  • 9
    • 4444221707 scopus 로고    scopus 로고
    • Calculation of shape anisotropy of micro-patterned NiFe films for on-chip RF applications
    • Jul.
    • M. Vroube, Y. Zhuang, B. Rejaei, N. Burghartz, A. M. Crawford, and S. X. Wang, "Calculation of shape anisotropy of micro-patterned NiFe films for on-chip RF applications," IEEE Trans. Magn., vol. 40, no. 4, pp. 2835-2837, Jul. 2004.
    • (2004) IEEE Trans. Magn. , vol.40 , Issue.4 , pp. 2835-2837
    • Vroube, M.1    Zhuang, Y.2    Rejaei, B.3    Burghartz, N.4    Crawford, A.M.5    Wang, S.X.6
  • 11
    • 0034260559 scopus 로고    scopus 로고
    • Application of bi-directional thin-film micro wire array to RF integrated inductors
    • Sep.
    • M. Yamaguchi, M. Suezawa, M. Arai, K. I. Shimada, Y. Tanabe, and S. Itoh, "Application of bi-directional thin-film micro wire array to RF integrated inductors," IEEE Trans. Magn., vol. 36, no. 5, pp. 3514-3517, Sep. 2000.
    • (2000) IEEE Trans. Magn. , vol.36 , Issue.5 , pp. 3514-3517
    • Yamaguchi, M.1    Suezawa, M.2    Arai, M.3    Shimada, K.I.4    Tanabe, Y.5    Itoh, S.6
  • 13
    • 0036763401 scopus 로고    scopus 로고
    • High-frequency microinductors with amorphous magnetic ground planes
    • Sep.
    • A. M. Crawford, D. Gardner, and S. X. Wang, "High-frequency microinductors with amorphous magnetic ground planes," IEEE Trans. Magn., vol. 38, no. 5, pp. 3168-3170, Sep. 2002.
    • (2002) IEEE Trans. Magn. , vol.38 , Issue.5 , pp. 3168-3170
    • Crawford, A.M.1    Gardner, D.2    Wang, S.X.3
  • 15
    • 0141929025 scopus 로고    scopus 로고
    • High frequency magnetic properties of CoZrNb films deposited by dynamic sputtering technique for GHz-Si-integrated planar inductors
    • B. Viala, O. Valls, P. Gaud, M. Aïd, R. Cuchet, D. Damiani, M. Ledieu, and O. Acher, "High frequency magnetic properties of CoZrNb films deposited by dynamic sputtering technique for GHz-Si-integrated planar inductors," Trans. Magn. Soc. Jpn., vol. 2, no. 5, pp. 384-387, 2002.
    • (2002) Trans. Magn. Soc. Jpn. , vol.2 , Issue.5 , pp. 384-387
    • Viala, B.1    Valls, O.2    Gaud, P.3    Aïd, M.4    Cuchet, R.5    Damiani, D.6    Ledieu, M.7    Acher, O.8
  • 16
    • 0037094562 scopus 로고    scopus 로고
    • Surface nitrogen concentration dependence of nitrogen incorporation in reactively sputtered FeXN
    • May
    • P. Zou and J. A. Bain, "Surface nitrogen concentration dependence of nitrogen incorporation in reactively sputtered FeXN," J. Appl. Phys., vol. 91, no. 10, pp. 6827-6829, May 2002.
    • (2002) J. Appl. Phys. , vol.91 , Issue.10 , pp. 6827-6829
    • Zou, P.1    Bain, J.A.2
  • 17
    • 0012083747 scopus 로고    scopus 로고
    • Microstructure and magnetism in FeTaN films deposited in the nanocrystalline state
    • B. Viala, M. K. Minor, and J. A. Barnard, "Microstructure and magnetism in FeTaN films deposited in the nanocrystalline state," J. Appl. Phys., vol. 80, no. 7, pp. 3941-3956, 1996.
    • (1996) J. Appl. Phys. , vol.80 , Issue.7 , pp. 3941-3956
    • Viala, B.1    Minor, M.K.2    Barnard, J.A.3
  • 18
    • 0030246556 scopus 로고    scopus 로고
    • Lattice dilation and local magnetic anisotropy in nitrogenated iron-based soft thin films
    • Sep.
    • _, "Lattice dilation and local magnetic anisotropy in nitrogenated iron-based soft thin films," IEEE Trans. Magn., vol. 32, no. 5, Sep. 1996.
    • (1996) IEEE Trans. Magn. , vol.32 , Issue.5
  • 19
    • 27744463610 scopus 로고    scopus 로고
    • FeHfN and FeHfNO soft magnetic films for RF applications
    • Oct.
    • S. C. Couderc, B. Viala, P. Ancey, and G. Bouche, "FeHfN and FeHfNO soft magnetic films for RF applications," IEEE Trans. Magn., vol. 41, no. 10, pp. -, Oct. 2005.
    • (2005) IEEE Trans. Magn. , vol.41 , Issue.10
    • Couderc, S.C.1    Viala, B.2    Ancey, P.3    Bouche, G.4
  • 20
    • 0025488877 scopus 로고
    • Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets
    • Sep.
    • G. Herzer, "Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets," IEEE Trans. Magn., vol. 26, no. 5, pp. 1397-1402, Sep. 1990.
    • (1990) IEEE Trans. Magn. , vol.26 , Issue.5 , pp. 1397-1402
    • Herzer, G.1
  • 21
    • 0025491895 scopus 로고    scopus 로고
    • Soft magnetism of Fe-based alloy sputtered films
    • M. Takahashi and T. Shimatsu, "Soft magnetism of Fe-based alloy sputtered films," IEEE Trans. Magn., vol. 26, no. 5, pp. 1485-1490.
    • IEEE Trans. Magn. , vol.26 , Issue.5 , pp. 1485-1490
    • Takahashi, M.1    Shimatsu, T.2
  • 22
    • 27744526991 scopus 로고
    • G. De Vries, Physica, vol. 25, p. 1221, 1959.
    • (1959) Physica , vol.25 , pp. 1221
    • De Vries, G.1
  • 24
    • 0036758569 scopus 로고    scopus 로고
    • Influence of stress and texture on soft magnetic properties of thin films
    • Sep.
    • P. Zou, W. Yu, and A. Bain, "Influence of stress and texture on soft magnetic properties of thin films," IEEE Trans. Magn., vol. 38, no. 5, pp. 3501-3520, Sep. 2002.
    • (2002) IEEE Trans. Magn. , vol.38 , Issue.5 , pp. 3501-3520
    • Zou, P.1    Yu, W.2    Bain, A.3
  • 25
    • 0018207073 scopus 로고
    • Magnetic properties of thin ferromagnetic films in relation to their microstructure
    • H. Hoffmann, "Magnetic properties of thin ferromagnetic films in relation to their microstructure," Thin Solid Films, vol. 58, pp. 223-233, 1979.
    • (1979) Thin Solid Films , vol.58 , pp. 223-233
    • Hoffmann, H.1
  • 26
    • 0024016931 scopus 로고
    • Micromagnetics of laminated permalloy films
    • May
    • J. C. Slonczewski, B. Petek, and B. E. Argyle, "Micromagnetics of laminated permalloy films," IEEE Trans. Magn., vol. 24, no. 3, pp. 2045-2053, May 1988.
    • (1988) IEEE Trans. Magn. , vol.24 , Issue.3 , pp. 2045-2053
    • Slonczewski, J.C.1    Petek, B.2    Argyle, B.E.3
  • 27
    • 0026124037 scopus 로고
    • Dynamic domain model for magnetic thin films
    • Mar.
    • N. Smith, "Dynamic domain model for magnetic thin films," IEEE Trans. Magn., vol. 27, no. 2, pp. 729-741, Mar. 1991.
    • (1991) IEEE Trans. Magn. , vol.27 , Issue.2 , pp. 729-741
    • Smith, N.1
  • 28
    • 27744601175 scopus 로고    scopus 로고
    • Investigation of anomalous losses in thick Cu ferromagnetic spiral inductors
    • Oct.
    • B. Viala, A. S. Royet, and S. Couderc, "Investigation of anomalous losses in thick Cu ferromagnetic spiral inductors," IEEE Trans. Magn., vol. 41, no. 10, pp. -, Oct. 2005.
    • (2005) IEEE Trans. Magn. , vol.41 , Issue.10
    • Viala, B.1    Royet, A.S.2    Couderc, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.