Integration of crossed anisotropy magnetic core into toroidal thin-film inductors

IEEE Transactions on Microwave Theory and Techniques

Volumn 53, Issue 6 II, 2005, Pages 2096-2099

  Frommberger, Michael ^a   Schmutz, Clemens ^a   Tewes, Michael ^a   McCord, Jeffrey ^b   Hartung, Wolfgang ^c   Losehand, Reinhard ^c   Quandt, Eckhard ^a  

^a CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

^b IFW DRESDEN   (Germany)

^c INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Anisotropy; Inductor; Magnetic cores; Magnetic devices; Permeability

Indexed keywords

ELECTRIC INDUCTORS; IRON COMPOUNDS; MAGNETIC ANISOTROPY; MAGNETIC DEVICES; MAGNETIC PERMEABILITY; MULTILAYERS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SPUTTER DEPOSITION; THIN FILMS;

MICROINDUCTORS; MICROSYSTEM; THIN FILM INDUCTORS; TOROIDAL INDUCTORS;

MAGNETIC CORES;

EID: 23144456812     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2005.848753     Document Type: Conference Paper

References (14)

1. B. Rejaei, M. Vroubel, Y. Zhuang, and J. N. Burghartz, "Assessment of ferromagnetic integrated inductors for Si-technology," in 4th Topical Silicon Monolithic Integrated Circuits in RF Systems Meeting Dig., Apr. 2003, pp. 100-103.
2. M. Yamaguchi, M. Baba, and K.-I. Arai, "Sandwich-type ferromagnetic RF integrated inductor," IEEE Trans. Microw. Theory Tech., vol. 49, no. 12, pp. 2331-2335, Dec. 2001.
3. D. Gardner, A. M. Crawford, and S. Wang, "High frequency (GHz) and low resistance integrated inductors using magnetic materials," in Proc. IEEE Int. Interconnect Tech. Conf., Jun. 2001, pp. 101-103.
4. A. M. Crawford, D. Gardner, and S. X. Wang, "High-frequency microinductors with amorphous magnetic ground planes," in IEEE Trans. Magn., vol. 38, Sep. 2002, pp. 3168-3170.
5. A. M. Crawford and S. X. Wang, "Effect of patterned magnetic shields on high-frequency integrated inductors," IEEE Trans. Magn., vol. 40, no. 4, pp. 2017-2019, Jul. 2004.
6. A. von der Weth and J. Aktaa, "Application of a model of nonlinear history-dependent magnetic behavior for inductance estimation of a microinductor," J. Magn. Magn. Mater., vol. 234, pp. 556-566, 2001.
7. A. Gromov, V. Korenivksi, and D. Haviland, "Analysis of current distribution in magnetic film inductors," J. Appl. Phys., vol. 85, no. 8, pp. 5202-5204, Apr. 1999.
8. Y. Zhuang, M. Vroubel, B. Rejaei, and J. N. Burghartz, "Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS," presented at the IEEE Int. Electron Devices Meeting, San Francisco, CA, 2002.
9. B. C. Webb, M. E. Re, C. V. Jahnes, and M. A. Russak, "High-frequency permeability of laminated and unlaminated, narrow thin-film magnetic stripes," J. Appl. Phys., vol. 69, no. 8, pp. 5611-5615, Apr. 1991.
10. J. S. Y. Feng and D. A. Thompson, "Permeability of narrow permalloy stripes," IEEE Trans. Magn., vol. MAG-13, no. 5, pp. 1521-1523, Sep. 1977.
11. I. Fergen, "Entwicklung, Herstellung und Charakterisierung weichmagnetischer Dünnschichten für Hochfrequenz-Anwendungen," Forschungszentrum Karlsruhe, Karlsruhe, Germany, FZKA6796, Apr. 2003.
12. M. Frommberger, M. Tewes, J. McCord, W. Hartung, R. Losehand, and E. Quandt, "A new approach to RF thin film microinductors," presented at the 34th Eur. Microwave Conf., Amsterdam, The Netherlands, Oct. 2004.
13. M. Frommberger, J. McCord, and E. Quandt, "High frequency properties of FeCoSiB thin films with crossed anisotropy," IEEE Trans. Magn., vol. 40, no. 4, pp. 2703-2705, Jul. 2004.
14. J. C. Slonczewski, B. Petek, and B. E. Argyle, "Micromagnetics of laminated permalloy films," IEEE Trans. Magn., vol. 24, pp. 2045-2054, May 1988.