Fabrication of a solenoid-type inductor with Fe-based soft magnetic core

Journal of Magnetism and Magnetic Materials

Volumn 308, Issue 2, 2007, Pages 284-288

  Lei, Chong ^a   Zhou, Yong ^a   Gao, Xiao Yu ^a   Ding, Wen ^a   Cao, Ying ^a   Choi, Hyung ^b   Won, Jonghwa ^b  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Fe based magnetic thin film; Inductance; MEMS; Quality factor; Solenoid type inductor

Indexed keywords

FINE POLISHING; QUALITY FACTOR; SOLENOID TYPE INDUCTOR;

DRY ETCHING; FABRICATION; INDUCTANCE; IRON; MAGNETIC CORES; MAGNETIC THIN FILMS; MICROELECTROMECHANICAL DEVICES; SOLENOIDS;

ELECTRIC INDUCTORS;

EID: 33749993141     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2006.06.002     Document Type: Article

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