Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

Journal of Applied Physics

Volumn 85, Issue 11, 1999, Pages 7919-7922

  Yamaguchi, M ^a   Suezawa, K ^a   Arai, K I ^a   Takahashi, Y ^b   Kikuchi, S ^b   Shimada, Y ^a   Li, W D ^a   Tanabe, S ^c   Ito, K ^c  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU GAKUIN UNIVERSITY   (Japan)

^c MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR TELEPHONE SYSTEMS; ELECTRIC COILS; ELECTRIC CONDUCTIVITY OF SOLIDS; IRON COMPOUNDS; MAGNETIC THIN FILM DEVICES; MAGNETIC THIN FILMS; SILICON WAFERS; SOFT MAGNETIC MATERIALS; TELEPHONE SETS;

MAGNETIC THIN-FILM INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0032613685     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370608     Document Type: Article

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