Optimization of carbon doped molybdenum oxide thin film coating process using designed experiments

Surface and Coatings Technology

Volumn 204, Issue 9-10, 2010, Pages 1493-1502

  Saikaew, Charnnarong ^a   Wisitsoraat, Anurat ^b   Sootticoon, Rangsrit ^a  

^a KHON KAEN UNIVERSITY   (Thailand)

^b NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

Carbon doped molybdenum oxide; Central composite design; Desirability function; Response surface analysis; Sputtering process

Indexed keywords

CENTRAL COMPOSITE DESIGNS; DESIRABILITY FUNCTION; MOLYBDENUM OXIDES; RESPONSE SURFACE ANALYSIS; SPUTTERING PROCESS;

ARGON; COATINGS; DEPOSITION RATES; DIGITAL CAMERAS; DOPING (ADDITIVES); METAL ANALYSIS; MOLYBDENUM; MOLYBDENUM COMPOUNDS; OXYGEN; REGRESSION ANALYSIS; SURFACE ANALYSIS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILM DEVICES; THIN FILMS;

DEPOSITION;

EID: 71049133046     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.09.083     Document Type: Article

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