Thin film rf magnetron sputtering of gadolinium-doped yttrium aluminum garnet ultraviolet emitting materials

Optical Materials

Volumn 29, Issue 2-3, 2006, Pages 183-191

  Deng, Y ^a   Fowlkes, J D ^a   Rack, P D ^a   Fitz Gerald, J M ^b  

^a University of Tennessee Knoxville   (United States)

^b University of Virginia   (United States)

Author keywords

Cathodoluminescence; Design of experiments; Gadolinium; Thin film sputtering; Ultraviolet; Yttrium aluminum garnet

Indexed keywords

CATHODOLUMINESCENCE; DESIGN FOR TESTABILITY; DOPING (ADDITIVES); ENERGY DISPERSIVE SPECTROSCOPY; GADOLINIUM; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; THIN FILMS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION; YTTRIUM COMPOUNDS;

DESIGN OF EXPERIMENT (DOE); FILM STOICHIOMETRY; THIN FILM SPUTTERING; YTTRIUM ALUMINUM GARNET;

GARNETS;

EID: 33750010635     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2005.08.024     Document Type: Article

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