Pen access an integrated isfet sensor array

Sensors

Volumn 9, Issue 11, 2009, Pages 8831-8851

  Nakazato, Kazuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Biosensor array; CMOS biotechnology; ISFET; Source drain follower

Indexed keywords

BIOSENSOR ARRAYS; CATALYTIC CHEMICAL VAPOR DEPOSITION; INTERFACE CIRCUITS; ISFET SENSOR ARRAY; MONOLITHICALLY INTEGRATED; SOURCE-DRAIN; STATISTICAL DISTRIBUTION; THERMOSYNECHOCOCCUS ELONGATUS;

CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGES; ION SENSITIVE FIELD EFFECT TRANSISTORS; MONOLITHIC INTEGRATED CIRCUITS; OLIGONUCLEOTIDES; SILICON NITRIDE;

SENSOR ARRAYS;

EID: 70849116662     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s91108831     Document Type: Review

References (42)

1. Stagni, C.; Guiducci, C.; Benini, L.; Riccò, B.; Carrara, S.; Paulus, C.; Schienle, M.; Thewes, R. A fully electronic label-free DNA sensor chip. IEEE J. Sensors 2007, 7, 577-585.
2. Ghafar-Zadeh, E.; Sawan, M. A Core-CBCM sigma delta capacitive sensor array dedicated to lab-on-chip applications. Sens. Actuat. A: Phys. 2008, 144, 304-313.
3. Prakash, S.B.; Abshire, P. Tracking cancer cell proliferation on a CMOS capacitance sensor chip.Biosens. Bioelectron. 2008, 23, 1449-1457.
4. Schienle, M.; Paulus, C.; Frey, A.; Hofmann, F.; Holzapfl, B.; Schindler-Bauer, P.; Thewes, R. A fully electronic DNA sensor with 128 positions and in-pixel A/D conversion. IEEE J. Solid-State Circuits 2004, 39, 2438-2445.
5. Chang, C.H.; Chang, S.R.; Lin, J.S.; Lee, Y.T.; Yeh, S.R.; Chen, H. A CMOS neuroelectronic interface based on two-dimensional transistor arrays with monolithically-integrated circuitry. Biosens. Bioelectron. 2009, 24, 1757-1764.
6. Levine, P.M.; Gong, P.; Levicky, R.; Shepard, K.L. Real-time, multiplexed electrochemical DNA detection using an active complementary metal-oxide-semiconductor biosensor array with integrated sensor electronics. Biosens. Bioelectron. 2009, 24, 1995-2001.
7. Bausells, J.; Carrabina, J.; Errachid, A.; Merlos, A. Ion-sensitive field-effect transistors fabricated in a commercial CMOS technology. Sens. Actuat. B: Chem. 1999, 57, 56-62.
8. Chung, W.Y.; Lin, Y.T.; Pijanowska, D.G.; Yang, C.H.; Wang, M.C.; Krzyskow, A.; Torbicz, W.New ISFET interface circuit design with temperature compensation. Microelectr. J. 2006, 37, 1105-1114.
9. Milgrew, M.J.; Cumming, D.R.S. Matching the Transconductance Characteristics of CMOS ISFET Arrays by Removing Trapped Charge. IEEE Trans. Electron Devices 2008, 55, 1074-1079.
10. Maruyama, Y.; Terao, S.; Sawada, K. Label free CMOS DNA image sensor based on the charge transfer technique. Bios. Bioelectron. 2009, 24, 3108-3112.
11. Bergveld, P. Development of an ion-sensitive solid-state device for neurophysical measurements. IEEE Trans. Biomed. Eng. 1970, BME-17, 70-71.
12. Bergveld, P. Thirty years of ISFETOLOGY: What happened in the past 30 years and what may happen in the next 30 years. Sens. Actuat. B: Chem. 2003, 88, 1-20.
13. Caras, S.; Janata, J. Field effect transistors sensitive to penicillin. Anal. Chem. 1980, 52, 1935-1937.
14. Lee, C.H.; Seo, H.I; Lee, Y.C.; Cho, B.W.; Jeong, H.; Dohn, B.K. All solid type ISFET glucose sensor with fast response and high sensitivity characteristics. Sens. Actuat. B: Chem. 2000, 64, 37-41.
15. Sekiguchi, T.; Nakamura M.; Kato, M.; Nishikawa, K.; Hokari, K.; Sugiyama, T.; Asaka, M. Immunological Helicobacter pylori urease analyzer based on ion-sensitive field effect transistor. Sens. Actuat. B: Chem. 2000, 67, 265-269.
16. Offenhäusser, A.; Sprössler, C.; Matsuzawa, M.; Knoll, W. Field-effect transistor array for monitoring electrical activity from mammalian neurons in culture. Bios. Bioelectron. 1997, 12, 819-826.
17. Meyburg, S.; Goryll, M.; Moers, J.; Ingebrandt, S.; Böcker-Meffert, S.; Lüth, H.; Offenhäusser, A. N-Channel field-effect transistors with floating gates for extracellular recordings. Biosens. Bioelectron. 2006, 21, 1037-1044.
18. Uslu, F.; Ingebrandt, S.; Mayer, D.; Böcker-Meffert, S.; Odenthal, M.; Offenhäusser, A. Labelfree fully electronic nucleic acid detection system based on a field-effect transistor device. Biosens. Bioelectron. 2004, 19, 1723-1731.
19. Sakata, T.; Kamahori, M.; Miyahara, Y. DNA Analysis Chip Based on Field-Effect Transistors. Jpn. J. Appl. Phys. 2005, 44, 2854-2859.
20. Pouthas, F.; Gentil, C.; Côte, D.; Bockelmann, U. DNA detection on transistor arrays following mutation-specific enzymatic amplification. Appl. Phys. Lett. 2004, 84, 1594-1596.
21. Sakata, T.; Miyahara, Y. Direct transduction of allele-specific primer extension into electrical signal using genetic field effect transistor. Biosens. Bioelectron. 2007, 22, 1311-1316.
22. Bergveld, P. The operation of an ISFET as an electronic device. Sens. Actuat. 1981, 1, 17-29.
23. Tsukada, J.; Ozawa, H.; Uno, S.; Nakazato, K.; Terasaki, N.; Yamamoto, N.; Hiraga, T.; Iwai, M.; Konno, M.; Ito, K.; Inoue, Y. Photosystem I bio-photosensor integrated with complimentary metal-oxide-semiconductor source-drain follower on a chip. Jpn. J. Appl. Phys. 2010, 49 (in press).
24. Emerson, R.; Chalmers, R.V.; Cederstand, C.; Brody, M. Effect of temperature on the long-wave limit of photosynthesis. Science 1956, 123, 673.
25. Terasaki, N.; Yamamoto, N.; Hiraga, T.; Yamanoi, Y.; Yonezawa, T.; Nishihara, H.; Ohmori, T.; Sakai, M.; Fujii, M.; Tohri, A.; Iwai, M.; Inoue, Y.; Yoneyama, S.; Minakata, M.; Enami, I. Plugging a molecular wire into photosystem I: reconstitution of the photoelectric conversion system on a gold electrode. Angew. Chem. Int. Ed. 2009, 48, 1585-1587.
26. Nakazato, K.; Ohura, M.; Uno, S. Source-drain follower for monolithically integrated sensor array. Electron. Lett. 2007, 43, 1255-1257.
27. Nakazato, K.; Ohura, M.; Uno, S. CMOS cascode source-drain follower for monolithically integrated biosensor array. IEICE Trans. Electron. 2008, E91-C, 1505-1515.
28. Nakazato, K.; Ohura, M.; Ozawa, H.; Uno, S. A BioCMOS LSI circuit with extended-gate FET sensor array. 2008 Int. Conf. on Solid State Devices and Materials (SSDM 2008), E6-3, Tsukuba, Japan, September 25, 2008.
29. Fujinaga, T.; Takagi, M.; Hashimoto, M.; Asari, S.; Saito, K. Effect of hydrogen on SiNx films deposited by Cat-CVD method. Thin Solid Films 2008, 516, 615-617.
30. Okada, S.; Matsumura, H. Improved properties of silicon nitride films prepared by the catalytic chemical vapor deposition method. Jpn. J. Appl. Phys. 1997, 36, 7035-7040.
31. Matsumura, H. Formation of silicon-based thin films prepared by catalytic chemical vapor deposition (Cat-CVD) method. Jpn. J. Appl. Phys. 1998, 37, 3175-3187.
32. Kagohashi, Y.; Ozawa, H.; Uno, S.; Nakazato, K.; Ohdaira, K.; Matsumura, H. Application of silicon nitride by catalytic chemical vapor deposition (Cat-CVD) to CMOS ISFET sensor LSI. 5th Int. Conf. on Molecular Electronics and Bioelectronics (M&BE5), D-P13, 251, Miyazaki, Japan, March 2009.
33. Kühnhold, K.; Ryssel, H. Modeling the pH response of silicon nitride ISFET devices. Sens. Actuat. B: Chem. 2000, 68, 307-312.
34. Harame, D.L.; Bousse, L.J.; Shott, J.D.; Meindl, J.D. Ion-sensing devices with silicon nitride and borosilicate glass insulators. IEEE Trans. Electron Devices 1987, ED-34, 1700-1707.
35. van Hal, R.E.G.; Eijkel, J.C.T.; Bergveld P. A general model to describe the electrostatic potential at electrolyte oxide interface. Advan. Colloid Interface Sci. 1996, 69, 31-62.
36. Mikolajick, T.; Kühnhold, R.; Schnupp, R.; Ryssel, H. The influence of surface oxidation on the pH-sensing properties of silicon nitride. Sens. Actuat. B: Chem. 1999, 58, 450-455.
37. Yin, L.T.; Chou, J.C.; Chung, W.Y.; Sun, T.P.; Hsiung, S.K. Characteristics of silicon nitride after O2 plasma surface treatment for pH-ISFET applications. IEEE Trans. Biomed. Eng. 2001,48, 340-344.
38. Hakho, L.; Ham, D.; Westervelt, R.M. CMOS Biotechnology; Springer: New York, NY, USA, 2007.
39. Feruglio, S.; Lu, G.N.; Garda, P.; Vasilescu, G. A review of the CMOS buried double junction (BDJ) photodetector and its applications. Sensors 2008, 8, 6566-6594.
40. Terasaki, N.; Yamamoto, N.; Hattori, M.; Tanigaki, N.; Hiraga, T.; Ito, K.; Konno, M.; Iwai, M.; Inoue, Y.; Uno, S.; Nakazato, K. Photo-sensor based on an FET utilizing a bio-component of photosystem I for use in imaging devices. Langmuir 2009, 25, 11969-11974.
41. Itoh, S.; Iwaki, M.; Ikegami, I. Modification of photosystem I reaction center by the extraction and exchange of chlorophylls and quinones. Biochim. Biophys. Acta 2001, 1507, 115-138.
42. Matsumoto, H; Tsukada, J.; Ozawa, H.; Uno, S.; Nakazato, K.; Terasaki, N.; Yamamoto, N.; Hiraga, T.; Iwai, M.; Konno, M.; Ito, K.; Inoue, Y. Integrated Bio-Photosensor Array with CMOS Cascode Source-Drain Follower. To be presented at the 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Sendai, Japan, J-8-5, October 9, 2009.